Characteristics of a Large Diameter Radio-Frequency Negative Hydrogen Ion Source

The characteristics of a 230-mm-diameter radio-frequency (rf) negative hydrogen ion source are investigated by the measurements of electron density and temperature. A hydrogen plasma is produced by an inductively coupled discharge operated with an rf frequency of 300 kHz and a power of a few tens of...

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Veröffentlicht in:Plasma and Fusion Research 2016/06/10, Vol.11, pp.2405088-2405088
Hauptverfasser: SASAKI, Yuko, TAKAYAMA, Sho, NAKANO, Haruhisa, KOMURO, Atsushi, TAKAHASHI, Kazunori, ANDO, Akira
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Sprache:eng
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