Microstructure Characterization of Multilayer Thin Coatings ZrN/Si3N4 by X‐Ray Diffraction Using Noncoplanar Measurement Geometry

The structural characterization of multilayer thin coatings is performed by X‐ray diffraction using a noncoplanar measurement geometry. The application of such a measurement geometry enables a reliable and comprehensive microstructural analysis of the material comparing to other measurement geometri...

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Veröffentlicht in:	Physica status solidi. A, Applications and materials science Applications and materials science, 2018-03, Vol.215 (5), p.n/a
Hauptverfasser:	Vlasenko, Svetlana, Benediktovitch, Andrei, Ulyanenkov, Alex, Uglov, Vladimir, Abadias, Grégory, O'Connell, Jacques, van Vuuren, Arno Janse
Format:	Artikel
Sprache:	eng
Schlagworte:	Coatings Diffraction ellipsoidal grains Geometry Grains Mathematical models Microstructural analysis Microstructure microstructure characterization multilayer thin coatings noncoplanar measurement geometry Parameters Structural analysis X‐ray diffraction
Online-Zugang:	Volltext
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