Multilayer Pb(Zr,Ti)O3 Thin Films for Ultrasonic Transducer
SUMMARY In this study, we have fabricated membranes which are composed of two‐ and four‐layer Pb(Zr,Ti)O3 thin films with internal electrodes by using sputtering depositions. Electrical and driving characteristics as ultrasonic transducers of these membranes are evaluated. By increasing number of la...
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| Veröffentlicht in: | Electronics and communications in Japan 2018-04, Vol.101 (4), p.63-68 |
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| container_end_page | 68 |
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| container_issue | 4 |
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| container_title | Electronics and communications in Japan |
| container_volume | 101 |
| creator | NAKAMOTO, SHOMA SANO, RYO KANDA, KENSUKE FUJITA, TAKAYUKI MAENAKA, KAZUSUKE |
| description | SUMMARY
In this study, we have fabricated membranes which are composed of two‐ and four‐layer Pb(Zr,Ti)O3 thin films with internal electrodes by using sputtering depositions. Electrical and driving characteristics as ultrasonic transducers of these membranes are evaluated. By increasing number of layers, the static displacement is reduced. However, for the multilayered membrane, the dynamic displacement became large because of the large mechanical Q factor in resonant vibration. The emitted sound pressure level and characteristics of the ultrasonic transducer are estimated. |
| doi_str_mv | 10.1002/ecj.12051 |
| format | Article |
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In this study, we have fabricated membranes which are composed of two‐ and four‐layer Pb(Zr,Ti)O3 thin films with internal electrodes by using sputtering depositions. Electrical and driving characteristics as ultrasonic transducers of these membranes are evaluated. By increasing number of layers, the static displacement is reduced. However, for the multilayered membrane, the dynamic displacement became large because of the large mechanical Q factor in resonant vibration. The emitted sound pressure level and characteristics of the ultrasonic transducer are estimated.</description><identifier>ISSN: 1942-9533</identifier><identifier>EISSN: 1942-9541</identifier><identifier>DOI: 10.1002/ecj.12051</identifier><language>eng</language><publisher>Hoboken: Wiley Subscription Services, Inc</publisher><subject>Lead zirconate titanates ; Membranes ; MEMS ; multilayer ; pMUT ; PZT thin film ; Resonant vibration ; Sound pressure ; Thin films ; Transducers ; Ultrasonic transducers ; Zirconium</subject><ispartof>Electronics and communications in Japan, 2018-04, Vol.101 (4), p.63-68</ispartof><rights>2018 Wiley Periodicals, Inc.</rights><rights>Copyright © 2018 by Wiley Periodicals, Inc.</rights><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktopdf>$$Uhttps://onlinelibrary.wiley.com/doi/pdf/10.1002%2Fecj.12051$$EPDF$$P50$$Gwiley$$H</linktopdf><linktohtml>$$Uhttps://onlinelibrary.wiley.com/doi/full/10.1002%2Fecj.12051$$EHTML$$P50$$Gwiley$$H</linktohtml><link.rule.ids>314,780,784,1417,27924,27925,45574,45575</link.rule.ids></links><search><creatorcontrib>NAKAMOTO, SHOMA</creatorcontrib><creatorcontrib>SANO, RYO</creatorcontrib><creatorcontrib>KANDA, KENSUKE</creatorcontrib><creatorcontrib>FUJITA, TAKAYUKI</creatorcontrib><creatorcontrib>MAENAKA, KAZUSUKE</creatorcontrib><title>Multilayer Pb(Zr,Ti)O3 Thin Films for Ultrasonic Transducer</title><title>Electronics and communications in Japan</title><description>SUMMARY
In this study, we have fabricated membranes which are composed of two‐ and four‐layer Pb(Zr,Ti)O3 thin films with internal electrodes by using sputtering depositions. Electrical and driving characteristics as ultrasonic transducers of these membranes are evaluated. By increasing number of layers, the static displacement is reduced. However, for the multilayered membrane, the dynamic displacement became large because of the large mechanical Q factor in resonant vibration. The emitted sound pressure level and characteristics of the ultrasonic transducer are estimated.</description><subject>Lead zirconate titanates</subject><subject>Membranes</subject><subject>MEMS</subject><subject>multilayer</subject><subject>pMUT</subject><subject>PZT thin film</subject><subject>Resonant vibration</subject><subject>Sound pressure</subject><subject>Thin films</subject><subject>Transducers</subject><subject>Ultrasonic transducers</subject><subject>Zirconium</subject><issn>1942-9533</issn><issn>1942-9541</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2018</creationdate><recordtype>article</recordtype><recordid>eNo9kM1LwzAchoMoOKcH_4OAFwW75ZePpsGTlM0PJvPQXbyEtE0xpWtn0iL7762beHrfw8P7woPQNZAZEELntqhnQImAEzQBxWmkBIfT_87YOboIoSYk5oKzCXp4G5reNWZvPX7Pbz_8febu1gxnn67FS9dsA646jzdN703oWlfgzJs2lENh_SU6q0wT7NVfTtFmucjS52i1fnpJH1dRTRMFUWmM4nkshbXSkhJEAkJK4GUuC2CSMpYrISqZGwoxYTGvlCrtCPERkIlgU3Rz3N357muwodd1N_h2vNSUAHBOEkVGan6kvl1j93rn3db4vQaif8XoUYw-iNGL9PVQ2A9ygVTg</recordid><startdate>201804</startdate><enddate>201804</enddate><creator>NAKAMOTO, SHOMA</creator><creator>SANO, RYO</creator><creator>KANDA, KENSUKE</creator><creator>FUJITA, TAKAYUKI</creator><creator>MAENAKA, KAZUSUKE</creator><general>Wiley Subscription Services, Inc</general><scope>7SC</scope><scope>7SP</scope><scope>8FD</scope><scope>JQ2</scope><scope>L7M</scope><scope>L~C</scope><scope>L~D</scope></search><sort><creationdate>201804</creationdate><title>Multilayer Pb(Zr,Ti)O3 Thin Films for Ultrasonic Transducer</title><author>NAKAMOTO, SHOMA ; SANO, RYO ; KANDA, KENSUKE ; FUJITA, TAKAYUKI ; MAENAKA, KAZUSUKE</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-j2891-daa94b675ee7e0d158157714db7c137233b955f7ba2160364f99de8154b7c7853</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2018</creationdate><topic>Lead zirconate titanates</topic><topic>Membranes</topic><topic>MEMS</topic><topic>multilayer</topic><topic>pMUT</topic><topic>PZT thin film</topic><topic>Resonant vibration</topic><topic>Sound pressure</topic><topic>Thin films</topic><topic>Transducers</topic><topic>Ultrasonic transducers</topic><topic>Zirconium</topic><toplevel>online_resources</toplevel><creatorcontrib>NAKAMOTO, SHOMA</creatorcontrib><creatorcontrib>SANO, RYO</creatorcontrib><creatorcontrib>KANDA, KENSUKE</creatorcontrib><creatorcontrib>FUJITA, TAKAYUKI</creatorcontrib><creatorcontrib>MAENAKA, KAZUSUKE</creatorcontrib><collection>Computer and Information Systems Abstracts</collection><collection>Electronics & Communications Abstracts</collection><collection>Technology Research Database</collection><collection>ProQuest Computer Science Collection</collection><collection>Advanced Technologies Database with Aerospace</collection><collection>Computer and Information Systems Abstracts Academic</collection><collection>Computer and Information Systems Abstracts Professional</collection><jtitle>Electronics and communications in Japan</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>NAKAMOTO, SHOMA</au><au>SANO, RYO</au><au>KANDA, KENSUKE</au><au>FUJITA, TAKAYUKI</au><au>MAENAKA, KAZUSUKE</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Multilayer Pb(Zr,Ti)O3 Thin Films for Ultrasonic Transducer</atitle><jtitle>Electronics and communications in Japan</jtitle><date>2018-04</date><risdate>2018</risdate><volume>101</volume><issue>4</issue><spage>63</spage><epage>68</epage><pages>63-68</pages><issn>1942-9533</issn><eissn>1942-9541</eissn><abstract>SUMMARY
In this study, we have fabricated membranes which are composed of two‐ and four‐layer Pb(Zr,Ti)O3 thin films with internal electrodes by using sputtering depositions. Electrical and driving characteristics as ultrasonic transducers of these membranes are evaluated. By increasing number of layers, the static displacement is reduced. However, for the multilayered membrane, the dynamic displacement became large because of the large mechanical Q factor in resonant vibration. The emitted sound pressure level and characteristics of the ultrasonic transducer are estimated.</abstract><cop>Hoboken</cop><pub>Wiley Subscription Services, Inc</pub><doi>10.1002/ecj.12051</doi><tpages>6</tpages></addata></record> |
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| ispartof | Electronics and communications in Japan, 2018-04, Vol.101 (4), p.63-68 |
| issn | 1942-9533 1942-9541 |
| language | eng |
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| subjects | Lead zirconate titanates Membranes MEMS multilayer pMUT PZT thin film Resonant vibration Sound pressure Thin films Transducers Ultrasonic transducers Zirconium |
| title | Multilayer Pb(Zr,Ti)O3 Thin Films for Ultrasonic Transducer |
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