Multilayer Pb(Zr,Ti)O3 Thin Films for Ultrasonic Transducer

SUMMARY In this study, we have fabricated membranes which are composed of two‐ and four‐layer Pb(Zr,Ti)O3 thin films with internal electrodes by using sputtering depositions. Electrical and driving characteristics as ultrasonic transducers of these membranes are evaluated. By increasing number of layers, the static displacement is reduced. However, for the multilayered membrane, the dynamic displacement became large because of the large mechanical Q factor in resonant vibration. The emitted sound pressure level and characteristics of the ultrasonic transducer are estimated.