Synthesis of high hardness, low COF diamond-like carbon using RF-PECVD at room temperature and evaluating its structure using electron microscopy

Diamond-like carbon (DLC) coatings have been deposited on Silicon wafers using a Radio Frequency based Plasma Enhanced Chemical Vapor Deposition (RF-PECVD) at room temperature. Experiments were carried out using a flow rate of 100sccm and 300sccm of acetylene (C2H2) gas and the bias voltage was varied from 300 to 450V for DLC deposition. Scanning electron microscope (SEM) and transmission electron microscope (TEM) has been used to study the structure and morphology of the DLC coating. TEM results of DLC coatings deposited at 100sccm C2H2 flow suggest that some crystalline features of diamond are present in the disordered matrix of DLC. Mechanical properties of DLC coatings were studied using a nanoindenter. The results indicate that the hardest DLC film is obtained at 100sccm flow rate of C2H2 deposited at 450V bias voltage of about 32.25GPa. The results also indicate that the lowest coefficient of friction (COF) of about 0.04 in DLC film is obtained at 300sccm flow rate of C2H2 deposited at 400V bias voltage. COF is found to be lower in high C2H2 flow rate, wherever relatively softer DLC was deposited. [Display omitted] •TEM images show crystalline content in amorphous DLC film.•High hardness 32GPa has been achieved for deposition at room temperature.•Very low COF of about 0.04 has been achieved for softer DLC films.•Raman shows the presence of sp3 hybridization.