Optimization of the readout of microdrum optomechanical resonators

Free-standing dielectric structures with a substrate underneath, as the SiN microdrums studied here, are the basis of optomechanical devices. Optimization of the optomechanical coupling is demanding in order to enhance the performance of these devices. The optomechanical coupling in the case of drum...

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Veröffentlicht in:	Microelectronic engineering 2017-11, Vol.183-184, p.37-41
Hauptverfasser:	Pini, Valerio, Ramos, Daniel, Dominguez, Carmen M., Ruz, Jose Jaime, Malvar, Oscar, Kosaka, Priscila M., Davis, Zachary J., Tamayo, Javier, Calleja, Montserrat
Format:	Artikel
Sprache:	eng
Schlagworte:	Actuation Computer simulation Coupling Dielectrics Eigenvalues Finite element method Microspectrophotometry Multiplexing Nanomechanics Optical cavities Optimization Optimization algorithms Optomechanics Resonators Studies Substrates
Online-Zugang:	Volltext
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