Optimization of the readout of microdrum optomechanical resonators
Free-standing dielectric structures with a substrate underneath, as the SiN microdrums studied here, are the basis of optomechanical devices. Optimization of the optomechanical coupling is demanding in order to enhance the performance of these devices. The optomechanical coupling in the case of drum...
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| Veröffentlicht in: | Microelectronic engineering 2017-11, Vol.183-184, p.37-41 |
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| container_title | Microelectronic engineering |
| container_volume | 183-184 |
| creator | Pini, Valerio Ramos, Daniel Dominguez, Carmen M. Ruz, Jose Jaime Malvar, Oscar Kosaka, Priscila M. Davis, Zachary J. Tamayo, Javier Calleja, Montserrat |
| description | Free-standing dielectric structures with a substrate underneath, as the SiN microdrums studied here, are the basis of optomechanical devices. Optimization of the optomechanical coupling is demanding in order to enhance the performance of these devices. The optomechanical coupling in the case of drum resonators critically depends on the thickness of the drum, the surface stress, the cavity length and the wavelength. Here, we develop a methodology that combines spatially multiplexed microspectrophotometry, optical modelling of the cavity and finite element method simulation of the mechanical eigenmodes that enables obtaining the properties of the optomechanical cavity and predicting the wavelength that optimizes the optomechanical coupling. By choosing this illumination wavelength we are able to spatially resolve the thermal motion of the microdrums up to the fourth mechanical mode ~20MHz. The presented study opens the door for further optimization pathways for optomechanical detection and actuation. |
| doi_str_mv | 10.1016/j.mee.2017.10.008 |
| format | Article |
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| issn | 0167-9317 1873-5568 |
| language | eng |
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| source | Elsevier ScienceDirect Journals Complete |
| subjects | Actuation Computer simulation Coupling Dielectrics Eigenvalues Finite element method Microspectrophotometry Multiplexing Nanomechanics Optical cavities Optimization Optimization algorithms Optomechanics Resonators Studies Substrates |
| title | Optimization of the readout of microdrum optomechanical resonators |
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