Effects of annealing temperature on nanomechanical and microstructural properties of Cu-doped In2O3 thin films

In this study, the effects of post-annealing on the microstructural, surface morphological and nanomechanical properties of Cu-doped In 2 O 3 (CIO) thin films were investigated using X-ray diffraction, scanning electron microscopy and nanoindentation techniques, respectively. The CIO thin films were...

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Veröffentlicht in:	Applied physics. A, Materials science & processing Materials science & processing, 2017-12, Vol.123 (12), p.1-6, Article 726
Hauptverfasser:	Jian, Sheng-Rui, Chen, Guo-Ju, Lee, Jyh-Wei
Format:	Artikel
Sprache:	eng
Schlagworte:	Annealing Applied physics Characterization and Evaluation of Materials Condensed Matter Physics Diamond films Diamonds Indium oxides Machines Magnetron sputtering Manufacturing Materials science Modulus of elasticity Nanoindentation Nanoindenters Nanotechnology Optical and Electronic Materials Physics Physics and Astronomy Processes Sapphire Stiffness Substrates Surfaces and Interfaces Temperature Thin Films
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