Ceramic coating deposition by electron beam evaporation

We describe a new method for the deposition of protective ceramic-based coatings. The novelty of the method lies in the unique interaction of the electron beam with a dielectric target, in which ions in the beam-produced plasma neutralize the target surface charge build-up. This effect is brought ab...

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Veröffentlicht in:Surface & coatings technology 2017-09, Vol.325, p.1-6
Hauptverfasser: Oks, E.M., Tyunkov, A.V., Yushkov, Yu.G., Zolotukhin, D.B.
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Sprache:eng
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