Robotic Manipulation of Highly Irregular Shaped Objects: Application to a Robot Crucible Packing System for Semiconductor Manufacture

The basic technology for a robotic system is developed to automate the packing of polycrystalline silicon nuggets into a fragile fused silica crucible in Czochralski (melt pulling) semiconductor wafer production. The highly irregular shapes of the nuggets and the packing constraints make this a diff...

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Veröffentlicht in:Journal of manufacturing processes 2002, Vol.4 (1), p.1-15
Hauptverfasser: Sujan, Vivek A., Dubowsky, Steven, Ohkami, Yoshiaki
Format: Artikel
Sprache:eng
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