Enhanced Optical Absorption of Ti Thin Film: Coupled Effect of Deposition and Post-deposition Temperatures

In the present work, structural, morphological and optical properties of nanostructured titanium (Ti) thin films have been studied. The Ti thin films were fabricated on glass substrate by direct current (DC) magnetron sputtering at varying deposition and post-deposition temperatures ( T DA ) ranging...

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Veröffentlicht in:JOM (1989) 2017-11, Vol.69 (11), p.2383-2389
Hauptverfasser: Jaiswal, Jyoti, Mourya, Satyendra, Malik, Gaurav, Chauhan, Samta, Daipuriya, Ritu, Singh, Manpreet, Chandra, Ramesh
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container_end_page 2389
container_issue 11
container_start_page 2383
container_title JOM (1989)
container_volume 69
creator Jaiswal, Jyoti
Mourya, Satyendra
Malik, Gaurav
Chauhan, Samta
Daipuriya, Ritu
Singh, Manpreet
Chandra, Ramesh
description In the present work, structural, morphological and optical properties of nanostructured titanium (Ti) thin films have been studied. The Ti thin films were fabricated on glass substrate by direct current (DC) magnetron sputtering at varying deposition and post-deposition temperatures ( T DA ) ranging from 373 K to 773 K. The microstructure and morphology of the Ti thin films were found to be highly dependent on T DA . The root mean square surface roughness ( δ rms ) was found to increase with T DA up to 673 K and then decreased at 773 K. The absorption ( A ) of Ti films has shown a similar trend as roughness with T DA ; however, the reflection ( R ) has shown an opposite trend. Maximum A ~99–86% and minimum R ~1–14% were observed in the spectral range of 300–1100 nm for the sample fabricated at T DA  = 673 K, which exhibited the highest δ rms  ~193 nm. Due to its excellent absorption, this film may be a potential candidate for photonic applications such as a super-absorber.
doi_str_mv 10.1007/s11837-017-2546-9
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subjects Absorption
Chemistry/Food Science
Deposition
Direct current
Earth Sciences
Engineering
Environment
Glass substrates
Grain boundaries
Grain growth
Grain size
Lasers
Magnetron sputtering
Materials science
Microelectromechanical systems
Microscopy
Morphology
Optical properties
Photonics
Physics
Residual stress
Spectrum analysis
Surface roughness
Temperature
Thin films
Titanium
title Enhanced Optical Absorption of Ti Thin Film: Coupled Effect of Deposition and Post-deposition Temperatures
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