Formation and Expansion Phases of an Atmospheric Pressure Glow Discharge in a PECVD Reactor via Fast ICCD Imaging
This paper reports on the experimental study of the dynamic evolution of a dielectric barrier discharge in an atmospheric-pressure plasma enhanced chemical vapor deposition reactor using a gated intensified charge coupled detector. It is observed that a diffuse atmospheric pressure glow is formed vi...
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| Veröffentlicht in: | IEEE transactions on plasma science 2008-08, Vol.36 (4), p.968-969 |
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| container_end_page | 969 |
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| container_issue | 4 |
| container_start_page | 968 |
| container_title | IEEE transactions on plasma science |
| container_volume | 36 |
| creator | Starostin, S.A. ElSabbagh, M.A.M. Aldea, E. de Vries, H. Creatore, M. van de Sanden, M.C.M. |
| description | This paper reports on the experimental study of the dynamic evolution of a dielectric barrier discharge in an atmospheric-pressure plasma enhanced chemical vapor deposition reactor using a gated intensified charge coupled detector. It is observed that a diffuse atmospheric pressure glow is formed via transition from Townsend-like discharge or, alternatively, can be initiated by a filamentary discharge. The formation of the glow current spot is followed by the lateral expansion of the discharge. |
| doi_str_mv | 10.1109/TPS.2008.924622 |
| format | Article |
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It is observed that a diffuse atmospheric pressure glow is formed via transition from Townsend-like discharge or, alternatively, can be initiated by a filamentary discharge. 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(IEEE) Aug 2008</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c386t-3070508d3b34058963a7354fdec49c85bfe897e0e204f685bf7b7073abade51d3</citedby><cites>FETCH-LOGICAL-c386t-3070508d3b34058963a7354fdec49c85bfe897e0e204f685bf7b7073abade51d3</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/4599099$$EHTML$$P50$$Gieee$$H</linktohtml><link.rule.ids>314,776,780,792,27901,27902,54733</link.rule.ids><linktorsrc>$$Uhttps://ieeexplore.ieee.org/document/4599099$$EView_record_in_IEEE$$FView_record_in_$$GIEEE</linktorsrc></links><search><creatorcontrib>Starostin, S.A.</creatorcontrib><creatorcontrib>ElSabbagh, M.A.M.</creatorcontrib><creatorcontrib>Aldea, E.</creatorcontrib><creatorcontrib>de Vries, H.</creatorcontrib><creatorcontrib>Creatore, M.</creatorcontrib><creatorcontrib>van de Sanden, M.C.M.</creatorcontrib><title>Formation and Expansion Phases of an Atmospheric Pressure Glow Discharge in a PECVD Reactor via Fast ICCD Imaging</title><title>IEEE transactions on plasma science</title><addtitle>TPS</addtitle><description>This paper reports on the experimental study of the dynamic evolution of a dielectric barrier discharge in an atmospheric-pressure plasma enhanced chemical vapor deposition reactor using a gated intensified charge coupled detector. 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The formation of the glow current spot is followed by the lateral expansion of the discharge.</description><subject>Atmospheric pressure</subject><subject>Atmospheric pressure (AP)</subject><subject>Atmospheric-pressure plasmas</subject><subject>Barometric pressure</subject><subject>Chemical vapor deposition</subject><subject>Dielectric barrier discharge</subject><subject>Dielectric substrates</subject><subject>Discharge</subject><subject>Dynamic tests</subject><subject>Electrodes</subject><subject>Electrostatic discharges</subject><subject>Evolution</subject><subject>glow discharge</subject><subject>Glow discharges</subject><subject>ignition</subject><subject>Inductors</subject><subject>Physics</subject><subject>Plasma</subject><subject>Plasma applications</subject><subject>Plasma chemistry</subject><subject>Plasma enhanced chemical vapor deposition</subject><subject>plasma enhanced chemical vapor deposition (PECVD)</subject><subject>Polymer films</subject><subject>Reactors</subject><subject>Studies</subject><issn>0093-3813</issn><issn>1939-9375</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2008</creationdate><recordtype>article</recordtype><sourceid>RIE</sourceid><recordid>eNpdkb1PwzAUxC0EEqUwM7BYLExpn-O4tscq_aBSJSoorJabvLSpmrjYKR__PamKGJie7ul3p5OOkFsGPcZA95eLl14MoHo6TgZxfEY6THMdaS7FOekAaB5xxfgluQphC8ASAXGHvE-cr2xTupraOqfjr72tw1EtNjZgoK5o_3TYVC7sN-jLjC48hnDwSKc790lHZcg21q-Rlm0CXYzTtxF9Rps1ztOP0tKJDQ2dpemIziq7Luv1Nbko7C7gze_tktfJeJk-RvOn6SwdzqOMq0ETcZAgQOV8xRMQSg-4lVwkRY5ZojMlVgUqLREwhqQYHLVcSZDcrmyOguW8Sx5OuXvv3g8YGlO1XXG3szW6QzBKChAJ57ol7_-RW3fwdVvOMC2YVAxEC_VPUOZdCB4Ls_dlZf23YWCOA5h2AHMcwJwGaB13J0eJiH90IrQGrfkPLrN_6Q</recordid><startdate>20080801</startdate><enddate>20080801</enddate><creator>Starostin, S.A.</creator><creator>ElSabbagh, M.A.M.</creator><creator>Aldea, E.</creator><creator>de Vries, H.</creator><creator>Creatore, M.</creator><creator>van de Sanden, M.C.M.</creator><general>IEEE</general><general>The Institute of Electrical and Electronics Engineers, Inc. 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It is observed that a diffuse atmospheric pressure glow is formed via transition from Townsend-like discharge or, alternatively, can be initiated by a filamentary discharge. The formation of the glow current spot is followed by the lateral expansion of the discharge.</abstract><cop>New York</cop><pub>IEEE</pub><doi>10.1109/TPS.2008.924622</doi><tpages>2</tpages></addata></record> |
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| ispartof | IEEE transactions on plasma science, 2008-08, Vol.36 (4), p.968-969 |
| issn | 0093-3813 1939-9375 |
| language | eng |
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| subjects | Atmospheric pressure Atmospheric pressure (AP) Atmospheric-pressure plasmas Barometric pressure Chemical vapor deposition Dielectric barrier discharge Dielectric substrates Discharge Dynamic tests Electrodes Electrostatic discharges Evolution glow discharge Glow discharges ignition Inductors Physics Plasma Plasma applications Plasma chemistry Plasma enhanced chemical vapor deposition plasma enhanced chemical vapor deposition (PECVD) Polymer films Reactors Studies |
| title | Formation and Expansion Phases of an Atmospheric Pressure Glow Discharge in a PECVD Reactor via Fast ICCD Imaging |
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