A simple fabrication process for stepwise gradient wrinkle pattern with spatially-controlled wavelength based on sequential oxygen plasma treatment

Though a gradient surface wrinkle pattern has drawn much interest recently, the previous efforts have been limited to the generation of continuous gradient patterns of surface wrinkle with gradually varying wavelengths. Here, we report a simple fabrication process for a stepwise gradient wrinkle pat...

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Veröffentlicht in:Microelectronic engineering 2017-05, Vol.176, p.101-105
Hauptverfasser: Lee, Jeong Su, Hong, Hyeonjun, Park, Sung Jea, Lee, Seong Jin, Kim, Dong Sung
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Sprache:eng
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