Enhancement of printing overlay accuracy by reducing the effects of mark deformations
The roll-based high-speed printing process has the two major advantages of high productivity and a simple process over the conventional electronic device manufacturing process. There have been several attempts to commercially apply the roll-based high-speed printing process to various electronic dev...
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Veröffentlicht in: | Microelectronic engineering 2017-08, Vol.180, p.8-14 |
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Sprache: | eng |
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