Enhancement of printing overlay accuracy by reducing the effects of mark deformations

The roll-based high-speed printing process has the two major advantages of high productivity and a simple process over the conventional electronic device manufacturing process. There have been several attempts to commercially apply the roll-based high-speed printing process to various electronic dev...

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Veröffentlicht in:Microelectronic engineering 2017-08, Vol.180, p.8-14
Hauptverfasser: Lee, Eonseok, Choi, Young-Man, Lee, Seung-Hyun, Kwon, Sin, Lee, Taik-Min, Kang, Dongwoo
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Sprache:eng
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