Cyclic magnetic actuation technique for thin film interfacial fatigue crack propagation

•A fixtureless fatigue delamination peel test for as-deposited thin films is proposed.•Magnetic actuation enables precision non-contact constant amplitude loading.•Crack propagation rate was captured using time-lapse optical microscopy.•Paris Law constants were determined for 1.6μm thick Cu film on...

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Veröffentlicht in:	Engineering fracture mechanics 2016-12, Vol.168, p.1-10
Hauptverfasser:	Ostrowicki, Gregory T., Sitaraman, Suresh K.
Format:	Artikel
Sprache:	eng
Schlagworte:	Actuation Crack propagation Cu thin film Cyclic fatigue Cyclic loads Delamination Fatigue failure Fatigue tests Fracture mechanics Interfacial delamination propagation Magnetic actuation Silicon substrates Thick films Thin films
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