Improvement of material removal rate of single-crystal diamond by polishing using H^sub 2^O^sub 2^ solution

In this study, we investigated the possibility of improving the material removal rate (MRR) of a single-crystal diamond (100) substrate by a polishing technique that utilizes a chemical reaction with H2O2 solution. To demonstrate the feasibility of improving the MRR of the diamond substrate, we inve...

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Veröffentlicht in:Diamond and related materials 2016-11, Vol.70, p.39
Hauptverfasser: Kubota, Akihisa, Nagae, Shin, Touge, Mutsumi
Format: Artikel
Sprache:eng
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