Increasing spatial resolution in the backscattered electron mode of scanning electron microscopy

Increasing spatial resolution in the backscattered electron mode of scanning electron microscopy

A new method for increasing spatial resolution in the detection of backscattered electrons and induced current in scanning electron microscopy (SEM) is proposed in terms of regularized Fourier transform. The real size of an electron probe and its blurring in a solid target sample are considered in f...

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Veröffentlicht in:Bulletin of the Russian Academy of Sciences. Physics 2011-09, Vol.75 (9), p.1181-1184
Hauptverfasser: Koshev, N. A., Luk’yanov, F. A., Rau, E. I., Sennov, R. A., Yagola, A. G.
Format: Artikel
Sprache:eng
Schlagworte:
Backscattering
Blurring
Electron microscopes
Fourier transforms
Hadrons
Heavy Ions
Nuclear Physics
Physics
Physics and Astronomy
Proceedings of the XXIII Russian Conference on Electron Microscopy
Scanning electron microscopy
Spatial resolution
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Beschreibung
Zusammenfassung:A new method for increasing spatial resolution in the detection of backscattered electrons and induced current in scanning electron microscopy (SEM) is proposed in terms of regularized Fourier transform. The real size of an electron probe and its blurring in a solid target sample are considered in forming the algorithm. The experiments reveal an almost 100% improvement in resolution in the processed images.
ISSN:1062-8738
1934-9432
DOI:10.3103/S1062873811090139