Influence of Microphone Housing on the Directional Response of Piezoelectric MEMS Microphones Inspired by Ormia Ochracea

The influence of custom microphone housings on the acoustic directionality and frequency response of a multiband bio-inspired MEMS microphone is presented. The 3.2 mm by 1.7 mm piezoelectric MEMS microphone, fabricated by a cost-effective multi-user process, has four frequency bands of operation bel...

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Veröffentlicht in:	IEEE sensors journal 2017-09, Vol.17 (17), p.5529-5536
Hauptverfasser:	Bauer, Ralf, Yansheng Zhang, Jackson, Joseph C., Whitmer, William M., Brimijoin, W. Owen, Akeroyd, Michael A., Uttamchandani, Deepak, Windmill, James F. C.
Format:	Artikel
Sprache:	eng
Schlagworte:	3D-printing acoustic response Acoustics Atmospheric modeling bio-inspired directional microphones Biomembranes Frequencies Frequency response Housings MEMS Microelectromechanical systems Micromechanical devices microphone housings Microphones Piezoelectricity Sensors Substrates
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