A MEMS Fishbone-Shaped Electrostatic Double-Ended Tuning Fork Resonator With Selectable Higher Modes
In this paper, a microelectromechanical systems fishbone-shaped electrostatic double-ended tuning fork (DETF) resonator with selectable higher modes is presented. The resonator can realize ten vibration modes with resonant frequencies from 137.929 to 913.476 kHz and multi-mode selection function. Di...
Gespeichert in:
| Veröffentlicht in: | Journal of microelectromechanical systems 2017-08, Vol.26 (4), p.793-801 |
|---|---|
| Hauptverfasser: | , , |
| Format: | Artikel |
| Sprache: | eng |
| Schlagworte: | |
| Online-Zugang: | Volltext bestellen |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
| container_end_page | 801 |
|---|---|
| container_issue | 4 |
| container_start_page | 793 |
| container_title | Journal of microelectromechanical systems |
| container_volume | 26 |
| creator | Ding, Hong Le, Xianhao Xie, Jin |
| description | In this paper, a microelectromechanical systems fishbone-shaped electrostatic double-ended tuning fork (DETF) resonator with selectable higher modes is presented. The resonator can realize ten vibration modes with resonant frequencies from 137.929 to 913.476 kHz and multi-mode selection function. Different from conventional electrostatic actuation methods, the proposed fishbone-shaped structure combined with tooth-shaped electrode generates bending moment on the beam and leads to vibration of the DETF. The vibration mode and the resonant frequency can be selected and measured according to the configuration of electrodes. Consequently, the proposed fishbone-shaped DETF resonator can provide multi-mode vibration and variable resonant frequency. The device is fabricated by the silicon-on-insulator process and tested via open-loop spectral response measurement. Finally, electrical parameters of the equivalent circuit model are extracted for further research. |
| doi_str_mv | 10.1109/JMEMS.2017.2695665 |
| format | Article |
| fullrecord | <record><control><sourceid>proquest_RIE</sourceid><recordid>TN_cdi_proquest_journals_1926800969</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><ieee_id>7919146</ieee_id><sourcerecordid>1926800969</sourcerecordid><originalsourceid>FETCH-LOGICAL-c295t-a324cf69412a7086a1b7a2dc4557cc85c86e7edf5237f90c126fea091aaea4b63</originalsourceid><addsrcrecordid>eNo9kE9PwyAYh4nRxDn9Anoh8dwJtEA5LrNzmi0mbsYjofTt2jnLhPbgt7d1iyfehN_z_nkQuqVkQilRDy-rbLWeMELlhAnFheBnaERVQiNCeXre14TLSFIuL9FVCDtCaJKkYoSKKR5QPK9DlbsGonVlDlDgbA-29S60pq0tfnRdvocoa4r-a9M1dbPFc-c_8RsE15jWefxRtxVew4CZPosX9bYCj1eugHCNLkqzD3BzesfofZ5tZoto-fr0PJsuI8sUbyMTs8SWot-aGUlSYWguDStswrm0NuU2FSChKDmLZamIpUyUYIiixoBJchGP0f2x78G77w5Cq3eu800_UlPFREqIEqpPsWPK9vcFD6U--PrL-B9NiR5s6j-berCpTzZ76O4I1QDwD0hFFU1E_AvXd3Ch</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype><pqid>1926800969</pqid></control><display><type>article</type><title>A MEMS Fishbone-Shaped Electrostatic Double-Ended Tuning Fork Resonator With Selectable Higher Modes</title><source>IEEE Electronic Library (IEL)</source><creator>Ding, Hong ; Le, Xianhao ; Xie, Jin</creator><creatorcontrib>Ding, Hong ; Le, Xianhao ; Xie, Jin</creatorcontrib><description>In this paper, a microelectromechanical systems fishbone-shaped electrostatic double-ended tuning fork (DETF) resonator with selectable higher modes is presented. The resonator can realize ten vibration modes with resonant frequencies from 137.929 to 913.476 kHz and multi-mode selection function. Different from conventional electrostatic actuation methods, the proposed fishbone-shaped structure combined with tooth-shaped electrode generates bending moment on the beam and leads to vibration of the DETF. The vibration mode and the resonant frequency can be selected and measured according to the configuration of electrodes. Consequently, the proposed fishbone-shaped DETF resonator can provide multi-mode vibration and variable resonant frequency. The device is fabricated by the silicon-on-insulator process and tested via open-loop spectral response measurement. Finally, electrical parameters of the equivalent circuit model are extracted for further research.</description><identifier>ISSN: 1057-7157</identifier><identifier>EISSN: 1941-0158</identifier><identifier>DOI: 10.1109/JMEMS.2017.2695665</identifier><identifier>CODEN: JMIYET</identifier><language>eng</language><publisher>New York: IEEE</publisher><subject>Actuation ; Circuits ; double-ended tuning fork ; Electrodes ; Electrostatics ; Equivalent circuits ; Mathematical model ; Microelectromechanical systems ; Microelectromechanical systems (MEMS) electrostatic resonators ; Micromechanical devices ; Modal choice ; multi-mode selection ; Resonant frequencies ; Resonant frequency ; Sensors ; Silicon ; Spectral sensitivity ; Teeth ; Tuning ; variable resonant frequency ; Vibration ; Vibration measurement ; Vibration mode ; Vibration modes ; Vibrations</subject><ispartof>Journal of microelectromechanical systems, 2017-08, Vol.26 (4), p.793-801</ispartof><rights>Copyright The Institute of Electrical and Electronics Engineers, Inc. (IEEE) 2017</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c295t-a324cf69412a7086a1b7a2dc4557cc85c86e7edf5237f90c126fea091aaea4b63</citedby><cites>FETCH-LOGICAL-c295t-a324cf69412a7086a1b7a2dc4557cc85c86e7edf5237f90c126fea091aaea4b63</cites><orcidid>0000-0003-3942-3046</orcidid></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/7919146$$EHTML$$P50$$Gieee$$H</linktohtml><link.rule.ids>314,776,780,792,27903,27904,54736</link.rule.ids><linktorsrc>$$Uhttps://ieeexplore.ieee.org/document/7919146$$EView_record_in_IEEE$$FView_record_in_$$GIEEE</linktorsrc></links><search><creatorcontrib>Ding, Hong</creatorcontrib><creatorcontrib>Le, Xianhao</creatorcontrib><creatorcontrib>Xie, Jin</creatorcontrib><title>A MEMS Fishbone-Shaped Electrostatic Double-Ended Tuning Fork Resonator With Selectable Higher Modes</title><title>Journal of microelectromechanical systems</title><addtitle>JMEMS</addtitle><description>In this paper, a microelectromechanical systems fishbone-shaped electrostatic double-ended tuning fork (DETF) resonator with selectable higher modes is presented. The resonator can realize ten vibration modes with resonant frequencies from 137.929 to 913.476 kHz and multi-mode selection function. Different from conventional electrostatic actuation methods, the proposed fishbone-shaped structure combined with tooth-shaped electrode generates bending moment on the beam and leads to vibration of the DETF. The vibration mode and the resonant frequency can be selected and measured according to the configuration of electrodes. Consequently, the proposed fishbone-shaped DETF resonator can provide multi-mode vibration and variable resonant frequency. The device is fabricated by the silicon-on-insulator process and tested via open-loop spectral response measurement. Finally, electrical parameters of the equivalent circuit model are extracted for further research.</description><subject>Actuation</subject><subject>Circuits</subject><subject>double-ended tuning fork</subject><subject>Electrodes</subject><subject>Electrostatics</subject><subject>Equivalent circuits</subject><subject>Mathematical model</subject><subject>Microelectromechanical systems</subject><subject>Microelectromechanical systems (MEMS) electrostatic resonators</subject><subject>Micromechanical devices</subject><subject>Modal choice</subject><subject>multi-mode selection</subject><subject>Resonant frequencies</subject><subject>Resonant frequency</subject><subject>Sensors</subject><subject>Silicon</subject><subject>Spectral sensitivity</subject><subject>Teeth</subject><subject>Tuning</subject><subject>variable resonant frequency</subject><subject>Vibration</subject><subject>Vibration measurement</subject><subject>Vibration mode</subject><subject>Vibration modes</subject><subject>Vibrations</subject><issn>1057-7157</issn><issn>1941-0158</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2017</creationdate><recordtype>article</recordtype><sourceid>RIE</sourceid><recordid>eNo9kE9PwyAYh4nRxDn9Anoh8dwJtEA5LrNzmi0mbsYjofTt2jnLhPbgt7d1iyfehN_z_nkQuqVkQilRDy-rbLWeMELlhAnFheBnaERVQiNCeXre14TLSFIuL9FVCDtCaJKkYoSKKR5QPK9DlbsGonVlDlDgbA-29S60pq0tfnRdvocoa4r-a9M1dbPFc-c_8RsE15jWefxRtxVew4CZPosX9bYCj1eugHCNLkqzD3BzesfofZ5tZoto-fr0PJsuI8sUbyMTs8SWot-aGUlSYWguDStswrm0NuU2FSChKDmLZamIpUyUYIiixoBJchGP0f2x78G77w5Cq3eu800_UlPFREqIEqpPsWPK9vcFD6U--PrL-B9NiR5s6j-berCpTzZ76O4I1QDwD0hFFU1E_AvXd3Ch</recordid><startdate>20170801</startdate><enddate>20170801</enddate><creator>Ding, Hong</creator><creator>Le, Xianhao</creator><creator>Xie, Jin</creator><general>IEEE</general><general>The Institute of Electrical and Electronics Engineers, Inc. (IEEE)</general><scope>97E</scope><scope>RIA</scope><scope>RIE</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>7SP</scope><scope>7TB</scope><scope>7U5</scope><scope>8FD</scope><scope>FR3</scope><scope>L7M</scope><orcidid>https://orcid.org/0000-0003-3942-3046</orcidid></search><sort><creationdate>20170801</creationdate><title>A MEMS Fishbone-Shaped Electrostatic Double-Ended Tuning Fork Resonator With Selectable Higher Modes</title><author>Ding, Hong ; Le, Xianhao ; Xie, Jin</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c295t-a324cf69412a7086a1b7a2dc4557cc85c86e7edf5237f90c126fea091aaea4b63</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2017</creationdate><topic>Actuation</topic><topic>Circuits</topic><topic>double-ended tuning fork</topic><topic>Electrodes</topic><topic>Electrostatics</topic><topic>Equivalent circuits</topic><topic>Mathematical model</topic><topic>Microelectromechanical systems</topic><topic>Microelectromechanical systems (MEMS) electrostatic resonators</topic><topic>Micromechanical devices</topic><topic>Modal choice</topic><topic>multi-mode selection</topic><topic>Resonant frequencies</topic><topic>Resonant frequency</topic><topic>Sensors</topic><topic>Silicon</topic><topic>Spectral sensitivity</topic><topic>Teeth</topic><topic>Tuning</topic><topic>variable resonant frequency</topic><topic>Vibration</topic><topic>Vibration measurement</topic><topic>Vibration mode</topic><topic>Vibration modes</topic><topic>Vibrations</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Ding, Hong</creatorcontrib><creatorcontrib>Le, Xianhao</creatorcontrib><creatorcontrib>Xie, Jin</creatorcontrib><collection>IEEE All-Society Periodicals Package (ASPP) 2005-present</collection><collection>IEEE All-Society Periodicals Package (ASPP) 1998-Present</collection><collection>IEEE Electronic Library (IEL)</collection><collection>CrossRef</collection><collection>Electronics & Communications Abstracts</collection><collection>Mechanical & Transportation Engineering Abstracts</collection><collection>Solid State and Superconductivity Abstracts</collection><collection>Technology Research Database</collection><collection>Engineering Research Database</collection><collection>Advanced Technologies Database with Aerospace</collection><jtitle>Journal of microelectromechanical systems</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Ding, Hong</au><au>Le, Xianhao</au><au>Xie, Jin</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>A MEMS Fishbone-Shaped Electrostatic Double-Ended Tuning Fork Resonator With Selectable Higher Modes</atitle><jtitle>Journal of microelectromechanical systems</jtitle><stitle>JMEMS</stitle><date>2017-08-01</date><risdate>2017</risdate><volume>26</volume><issue>4</issue><spage>793</spage><epage>801</epage><pages>793-801</pages><issn>1057-7157</issn><eissn>1941-0158</eissn><coden>JMIYET</coden><abstract>In this paper, a microelectromechanical systems fishbone-shaped electrostatic double-ended tuning fork (DETF) resonator with selectable higher modes is presented. The resonator can realize ten vibration modes with resonant frequencies from 137.929 to 913.476 kHz and multi-mode selection function. Different from conventional electrostatic actuation methods, the proposed fishbone-shaped structure combined with tooth-shaped electrode generates bending moment on the beam and leads to vibration of the DETF. The vibration mode and the resonant frequency can be selected and measured according to the configuration of electrodes. Consequently, the proposed fishbone-shaped DETF resonator can provide multi-mode vibration and variable resonant frequency. The device is fabricated by the silicon-on-insulator process and tested via open-loop spectral response measurement. Finally, electrical parameters of the equivalent circuit model are extracted for further research.</abstract><cop>New York</cop><pub>IEEE</pub><doi>10.1109/JMEMS.2017.2695665</doi><tpages>9</tpages><orcidid>https://orcid.org/0000-0003-3942-3046</orcidid></addata></record> |
| fulltext | fulltext_linktorsrc |
| identifier | ISSN: 1057-7157 |
| ispartof | Journal of microelectromechanical systems, 2017-08, Vol.26 (4), p.793-801 |
| issn | 1057-7157 1941-0158 |
| language | eng |
| recordid | cdi_proquest_journals_1926800969 |
| source | IEEE Electronic Library (IEL) |
| subjects | Actuation Circuits double-ended tuning fork Electrodes Electrostatics Equivalent circuits Mathematical model Microelectromechanical systems Microelectromechanical systems (MEMS) electrostatic resonators Micromechanical devices Modal choice multi-mode selection Resonant frequencies Resonant frequency Sensors Silicon Spectral sensitivity Teeth Tuning variable resonant frequency Vibration Vibration measurement Vibration mode Vibration modes Vibrations |
| title | A MEMS Fishbone-Shaped Electrostatic Double-Ended Tuning Fork Resonator With Selectable Higher Modes |
| url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-27T12%3A57%3A23IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-proquest_RIE&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=A%20MEMS%20Fishbone-Shaped%20Electrostatic%20Double-Ended%20Tuning%20Fork%20Resonator%20With%20Selectable%20Higher%20Modes&rft.jtitle=Journal%20of%20microelectromechanical%20systems&rft.au=Ding,%20Hong&rft.date=2017-08-01&rft.volume=26&rft.issue=4&rft.spage=793&rft.epage=801&rft.pages=793-801&rft.issn=1057-7157&rft.eissn=1941-0158&rft.coden=JMIYET&rft_id=info:doi/10.1109/JMEMS.2017.2695665&rft_dat=%3Cproquest_RIE%3E1926800969%3C/proquest_RIE%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_pqid=1926800969&rft_id=info:pmid/&rft_ieee_id=7919146&rfr_iscdi=true |