Aluminum hydroxocarboxylates in solution deposition of planarization alumina films

Aluminum hydroxocarboxylates in solution deposition of planarization alumina films

Aluminum hydroxocarboxylates derived from butyric, pivalic, valeric, and isovaleric acids were synthesized and characterized. The synthesized hydroxocarboxylates were suspended in isopropanol and reacted with diethylenetriamine and monoethanolamine, which acted as hydrolyzing and complex-forming age...

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Veröffentlicht in:Russian journal of general chemistry 2017-06, Vol.87 (6), p.1209-1216
Hauptverfasser: Tsymbarenko, D. M., Martynova, I. A., Ryzhkov, N. V., Kuz’mina, N. P.
Format: Artikel
Sprache:eng
Schlagworte:
Aluminum
Aluminum oxide
Chemical-mechanical polishing
Chemistry
Chemistry and Materials Science
Chemistry/Food Science
Deposition
Isopropanol
Monoethanolamine (MEA)
Substrates
Synthesis
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Zusammenfassung:Aluminum hydroxocarboxylates derived from butyric, pivalic, valeric, and isovaleric acids were synthesized and characterized. The synthesized hydroxocarboxylates were suspended in isopropanol and reacted with diethylenetriamine and monoethanolamine, which acted as hydrolyzing and complex-forming agents, to obtain precursor solutions for chemical deposition of smooth amorphous alumina films on metal substrates.
ISSN:1070-3632
1608-3350
DOI:10.1134/S1070363217060172