Morphology and inner structure of ethanol sensitive thin films of tin oxide operating at near room temperature
Thin tin oxide films were fabricated by reactive RF magnetron sputtering. It was shown that the films possess gas sensitivity to ethanol vapor at 38°C. Measurements of the morphology and cleavage inner structure of the samples by atomic-force and scanning electron microscopy demonstrate that the fil...
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| Veröffentlicht in: | Technical physics letters 2017-06, Vol.43 (6), p.531-534 |
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| container_title | Technical physics letters |
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| creator | Mahdi, O. S. Malyar, I. V. Galushka, V. V. Smirnov, A. V. Sinev, I. V. Venig, S. B. |
| description | Thin tin oxide films were fabricated by reactive RF magnetron sputtering. It was shown that the films possess gas sensitivity to ethanol vapor at 38°C. Measurements of the morphology and cleavage inner structure of the samples by atomic-force and scanning electron microscopy demonstrate that the films are composed of nanodimensional rod-like grains oriented normally to the substrate. The grains are separated by pores piercing the whole film. It was found that the grain diameter distribution is normal logarithmic one with several centers related as small integers, which indicates that the grains coalesce. The minimum grain size of 6 nm might correspond to the critical nucleus size under the used conditions of film deposition. |
| doi_str_mv | 10.1134/S1063785017060104 |
| format | Article |
| fullrecord | <record><control><sourceid>proquest_cross</sourceid><recordid>TN_cdi_proquest_journals_1918881924</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>1918881924</sourcerecordid><originalsourceid>FETCH-LOGICAL-c316t-a873841f8e35423361c566cef72aef5df6ff7838180adcd917f1b4e257cc9d53</originalsourceid><addsrcrecordid>eNp1kE9LxDAQxYsouK5-AG8Bz9VM06TpURb_wYoH915iOtnt0iY1yYr77U1dD4J4mhne772Bl2WXQK8BWHnzClSwSnIKFRUUaHmUzYDWNBecseNpFyyf9NPsLIQtpVQWvJ5l9tn5ceN6t94TZVvSWYuehOh3Ou48EmcIxo2yricBbehi94EkbjpLTNcPYdJjOtxn1yZ4RK_SuSYqEovKE-_cQCIO30LKO89OjOoDXvzMeba6v1stHvPly8PT4naZawYi5kpWTJZgJDJeFowJ0FwIjaYqFBreGmFMJZkESVWr2xoqA28lFrzSum45m2dXh9jRu_cdhths3c7b9LGBGqSUUBdlouBAae9C8Gia0XeD8vsGaDO12vxpNXmKgyck1q7R_0r-1_QFchd6xQ</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype><pqid>1918881924</pqid></control><display><type>article</type><title>Morphology and inner structure of ethanol sensitive thin films of tin oxide operating at near room temperature</title><source>SpringerLink Journals - AutoHoldings</source><creator>Mahdi, O. S. ; Malyar, I. V. ; Galushka, V. V. ; Smirnov, A. V. ; Sinev, I. V. ; Venig, S. B.</creator><creatorcontrib>Mahdi, O. S. ; Malyar, I. V. ; Galushka, V. V. ; Smirnov, A. V. ; Sinev, I. V. ; Venig, S. B.</creatorcontrib><description>Thin tin oxide films were fabricated by reactive RF magnetron sputtering. It was shown that the films possess gas sensitivity to ethanol vapor at 38°C. Measurements of the morphology and cleavage inner structure of the samples by atomic-force and scanning electron microscopy demonstrate that the films are composed of nanodimensional rod-like grains oriented normally to the substrate. The grains are separated by pores piercing the whole film. It was found that the grain diameter distribution is normal logarithmic one with several centers related as small integers, which indicates that the grains coalesce. The minimum grain size of 6 nm might correspond to the critical nucleus size under the used conditions of film deposition.</description><identifier>ISSN: 1063-7850</identifier><identifier>EISSN: 1090-6533</identifier><identifier>DOI: 10.1134/S1063785017060104</identifier><language>eng</language><publisher>Moscow: Pleiades Publishing</publisher><subject>Alloys ; Atomic force microscopy ; Atomic structure ; Classical and Continuum Physics ; Cleavage ; Coalescing ; Ethanol ; Grain size ; Grains ; Integers ; Magnetron sputtering ; Morphology ; Nuclei ; Oxide coatings ; Physics ; Physics and Astronomy ; Piercing ; Porosity ; Room temperature ; Scanning electron microscopy ; Thin films ; Tin oxides</subject><ispartof>Technical physics letters, 2017-06, Vol.43 (6), p.531-534</ispartof><rights>Pleiades Publishing, Ltd. 2017</rights><rights>Copyright Springer Science & Business Media 2017</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c316t-a873841f8e35423361c566cef72aef5df6ff7838180adcd917f1b4e257cc9d53</citedby><cites>FETCH-LOGICAL-c316t-a873841f8e35423361c566cef72aef5df6ff7838180adcd917f1b4e257cc9d53</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktopdf>$$Uhttps://link.springer.com/content/pdf/10.1134/S1063785017060104$$EPDF$$P50$$Gspringer$$H</linktopdf><linktohtml>$$Uhttps://link.springer.com/10.1134/S1063785017060104$$EHTML$$P50$$Gspringer$$H</linktohtml><link.rule.ids>314,776,780,27903,27904,41467,42536,51297</link.rule.ids></links><search><creatorcontrib>Mahdi, O. S.</creatorcontrib><creatorcontrib>Malyar, I. V.</creatorcontrib><creatorcontrib>Galushka, V. V.</creatorcontrib><creatorcontrib>Smirnov, A. V.</creatorcontrib><creatorcontrib>Sinev, I. V.</creatorcontrib><creatorcontrib>Venig, S. B.</creatorcontrib><title>Morphology and inner structure of ethanol sensitive thin films of tin oxide operating at near room temperature</title><title>Technical physics letters</title><addtitle>Tech. Phys. Lett</addtitle><description>Thin tin oxide films were fabricated by reactive RF magnetron sputtering. It was shown that the films possess gas sensitivity to ethanol vapor at 38°C. Measurements of the morphology and cleavage inner structure of the samples by atomic-force and scanning electron microscopy demonstrate that the films are composed of nanodimensional rod-like grains oriented normally to the substrate. The grains are separated by pores piercing the whole film. It was found that the grain diameter distribution is normal logarithmic one with several centers related as small integers, which indicates that the grains coalesce. The minimum grain size of 6 nm might correspond to the critical nucleus size under the used conditions of film deposition.</description><subject>Alloys</subject><subject>Atomic force microscopy</subject><subject>Atomic structure</subject><subject>Classical and Continuum Physics</subject><subject>Cleavage</subject><subject>Coalescing</subject><subject>Ethanol</subject><subject>Grain size</subject><subject>Grains</subject><subject>Integers</subject><subject>Magnetron sputtering</subject><subject>Morphology</subject><subject>Nuclei</subject><subject>Oxide coatings</subject><subject>Physics</subject><subject>Physics and Astronomy</subject><subject>Piercing</subject><subject>Porosity</subject><subject>Room temperature</subject><subject>Scanning electron microscopy</subject><subject>Thin films</subject><subject>Tin oxides</subject><issn>1063-7850</issn><issn>1090-6533</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2017</creationdate><recordtype>article</recordtype><recordid>eNp1kE9LxDAQxYsouK5-AG8Bz9VM06TpURb_wYoH915iOtnt0iY1yYr77U1dD4J4mhne772Bl2WXQK8BWHnzClSwSnIKFRUUaHmUzYDWNBecseNpFyyf9NPsLIQtpVQWvJ5l9tn5ceN6t94TZVvSWYuehOh3Ou48EmcIxo2yricBbehi94EkbjpLTNcPYdJjOtxn1yZ4RK_SuSYqEovKE-_cQCIO30LKO89OjOoDXvzMeba6v1stHvPly8PT4naZawYi5kpWTJZgJDJeFowJ0FwIjaYqFBreGmFMJZkESVWr2xoqA28lFrzSum45m2dXh9jRu_cdhths3c7b9LGBGqSUUBdlouBAae9C8Gia0XeD8vsGaDO12vxpNXmKgyck1q7R_0r-1_QFchd6xQ</recordid><startdate>20170601</startdate><enddate>20170601</enddate><creator>Mahdi, O. S.</creator><creator>Malyar, I. V.</creator><creator>Galushka, V. V.</creator><creator>Smirnov, A. V.</creator><creator>Sinev, I. V.</creator><creator>Venig, S. B.</creator><general>Pleiades Publishing</general><general>Springer Nature B.V</general><scope>AAYXX</scope><scope>CITATION</scope></search><sort><creationdate>20170601</creationdate><title>Morphology and inner structure of ethanol sensitive thin films of tin oxide operating at near room temperature</title><author>Mahdi, O. S. ; Malyar, I. V. ; Galushka, V. V. ; Smirnov, A. V. ; Sinev, I. V. ; Venig, S. B.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c316t-a873841f8e35423361c566cef72aef5df6ff7838180adcd917f1b4e257cc9d53</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2017</creationdate><topic>Alloys</topic><topic>Atomic force microscopy</topic><topic>Atomic structure</topic><topic>Classical and Continuum Physics</topic><topic>Cleavage</topic><topic>Coalescing</topic><topic>Ethanol</topic><topic>Grain size</topic><topic>Grains</topic><topic>Integers</topic><topic>Magnetron sputtering</topic><topic>Morphology</topic><topic>Nuclei</topic><topic>Oxide coatings</topic><topic>Physics</topic><topic>Physics and Astronomy</topic><topic>Piercing</topic><topic>Porosity</topic><topic>Room temperature</topic><topic>Scanning electron microscopy</topic><topic>Thin films</topic><topic>Tin oxides</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Mahdi, O. S.</creatorcontrib><creatorcontrib>Malyar, I. V.</creatorcontrib><creatorcontrib>Galushka, V. V.</creatorcontrib><creatorcontrib>Smirnov, A. V.</creatorcontrib><creatorcontrib>Sinev, I. V.</creatorcontrib><creatorcontrib>Venig, S. B.</creatorcontrib><collection>CrossRef</collection><jtitle>Technical physics letters</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Mahdi, O. S.</au><au>Malyar, I. V.</au><au>Galushka, V. V.</au><au>Smirnov, A. V.</au><au>Sinev, I. V.</au><au>Venig, S. B.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Morphology and inner structure of ethanol sensitive thin films of tin oxide operating at near room temperature</atitle><jtitle>Technical physics letters</jtitle><stitle>Tech. Phys. Lett</stitle><date>2017-06-01</date><risdate>2017</risdate><volume>43</volume><issue>6</issue><spage>531</spage><epage>534</epage><pages>531-534</pages><issn>1063-7850</issn><eissn>1090-6533</eissn><abstract>Thin tin oxide films were fabricated by reactive RF magnetron sputtering. It was shown that the films possess gas sensitivity to ethanol vapor at 38°C. Measurements of the morphology and cleavage inner structure of the samples by atomic-force and scanning electron microscopy demonstrate that the films are composed of nanodimensional rod-like grains oriented normally to the substrate. The grains are separated by pores piercing the whole film. It was found that the grain diameter distribution is normal logarithmic one with several centers related as small integers, which indicates that the grains coalesce. The minimum grain size of 6 nm might correspond to the critical nucleus size under the used conditions of film deposition.</abstract><cop>Moscow</cop><pub>Pleiades Publishing</pub><doi>10.1134/S1063785017060104</doi><tpages>4</tpages></addata></record> |
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| subjects | Alloys Atomic force microscopy Atomic structure Classical and Continuum Physics Cleavage Coalescing Ethanol Grain size Grains Integers Magnetron sputtering Morphology Nuclei Oxide coatings Physics Physics and Astronomy Piercing Porosity Room temperature Scanning electron microscopy Thin films Tin oxides |
| title | Morphology and inner structure of ethanol sensitive thin films of tin oxide operating at near room temperature |
| url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-26T14%3A42%3A21IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-proquest_cross&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=Morphology%20and%20inner%20structure%20of%20ethanol%20sensitive%20thin%20films%20of%20tin%20oxide%20operating%20at%20near%20room%20temperature&rft.jtitle=Technical%20physics%20letters&rft.au=Mahdi,%20O.%20S.&rft.date=2017-06-01&rft.volume=43&rft.issue=6&rft.spage=531&rft.epage=534&rft.pages=531-534&rft.issn=1063-7850&rft.eissn=1090-6533&rft_id=info:doi/10.1134/S1063785017060104&rft_dat=%3Cproquest_cross%3E1918881924%3C/proquest_cross%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_pqid=1918881924&rft_id=info:pmid/&rfr_iscdi=true |