Formation of “negative” silicon whiskers

An approach has been proposed for producing “negative” whiskers in Si wafers which is based on the thermal migration of silicon–metal (Si + M) melt droplets in the field of a transverse temperature gradient. We have obtained regular systems of negative whiskers in the form of through holes in Si {11...

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Veröffentlicht in:	Inorganic materials 2017-08, Vol.53 (8), p.775-780
Hauptverfasser:	Nebol’sin, V. A., Dunaev, A. I., Vorob’ev, A. Yu, Samofalova, A. S., Zenin, V. V.
Format:	Artikel
Sprache:	eng
Schlagworte:	Chemistry Chemistry and Materials Science Crystal structure Curvature Desorption Dissolution Droplets Industrial Chemistry/Chemical Engineering Inorganic Chemistry Materials Science Migration Silicon Temperature gradients Wafers
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