Influence of the high-temperature annealing on the structure and mechanical properties of vacuum–arc coatings from Mo/(Ti + 6 wt % Si)N

Scanning electron microscopy with energy dispersive element microanalysis, X-ray structural analysis, and microindentation were used to study the effect of the deposition conditions in a reactive nitrogen atmosphere on the growth morphology, phase composition, structure, and microhardness of vacuum–...

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Veröffentlicht in:	Journal of superhard materials 2017-05, Vol.39 (3), p.172-177
Hauptverfasser:	Beresnev, V. M., Klimenko, S. A., Sobol’, O. V., Litovchenko, S. V., Pogrebnjak, A. D., Srebnyuk, P. A., Kolesnikov, D. A., Meilekhov, A. A., Postel’nik, A. A., Nemchenko, U. S.
Format:	Artikel
Sprache:	eng
Schlagworte:	Annealing Cathodes Chemistry Chemistry and Materials Science Coatings Deposition Dispersion Evaporation Hardness Mechanical properties Microhardness Nitrogen Phase composition Physical Chemistry Production Properties Scanning electron microscopy Structural analysis Structure Surface hardness Titanium nitride
Online-Zugang:	Volltext
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