Influence of the high-temperature annealing on the structure and mechanical properties of vacuum–arc coatings from Mo/(Ti + 6 wt % Si)N
Scanning electron microscopy with energy dispersive element microanalysis, X-ray structural analysis, and microindentation were used to study the effect of the deposition conditions in a reactive nitrogen atmosphere on the growth morphology, phase composition, structure, and microhardness of vacuum–...
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| Veröffentlicht in: | Journal of superhard materials 2017-05, Vol.39 (3), p.172-177 |
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| creator | Beresnev, V. M. Klimenko, S. A. Sobol’, O. V. Litovchenko, S. V. Pogrebnjak, A. D. Srebnyuk, P. A. Kolesnikov, D. A. Meilekhov, A. A. Postel’nik, A. A. Nemchenko, U. S. |
| description | Scanning electron microscopy with energy dispersive element microanalysis, X-ray structural analysis, and microindentation were used to study the effect of the deposition conditions in a reactive nitrogen atmosphere on the growth morphology, phase composition, structure, and microhardness of vacuum–arc multilayer coatings produced by the evaporation of cathodes from Mo and (Ti + 6 wt % Si) both after their deposition and after high-temperature annealing. It has been established that the use of the composite cathode of Ti and Si allows the formation of the structure state inclined to ordering to form a two-phase compound from TiN and Ti
5
Si
3
at high-temperature annealing. In this case the coating hardness increases to a value higher than 45 GPa. |
| doi_str_mv | 10.3103/S1063457617030042 |
| format | Article |
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5
Si
3
at high-temperature annealing. In this case the coating hardness increases to a value higher than 45 GPa.</description><identifier>ISSN: 1063-4576</identifier><identifier>EISSN: 1934-9408</identifier><identifier>DOI: 10.3103/S1063457617030042</identifier><language>eng</language><publisher>New York: Allerton Press</publisher><subject>Annealing ; Cathodes ; Chemistry ; Chemistry and Materials Science ; Coatings ; Deposition ; Dispersion ; Evaporation ; Hardness ; Mechanical properties ; Microhardness ; Nitrogen ; Phase composition ; Physical Chemistry ; Production ; Properties ; Scanning electron microscopy ; Structural analysis ; Structure ; Surface hardness ; Titanium nitride</subject><ispartof>Journal of superhard materials, 2017-05, Vol.39 (3), p.172-177</ispartof><rights>Allerton Press, Inc. 2017</rights><rights>Copyright Springer Science & Business Media 2017</rights><lds50>peer_reviewed</lds50><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c359t-61a8ff12951b7df5007891e3aeaabd502224ac352728b8bbfc6d7d8ba9b821d93</citedby><cites>FETCH-LOGICAL-c359t-61a8ff12951b7df5007891e3aeaabd502224ac352728b8bbfc6d7d8ba9b821d93</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktopdf>$$Uhttps://link.springer.com/content/pdf/10.3103/S1063457617030042$$EPDF$$P50$$Gspringer$$H</linktopdf><linktohtml>$$Uhttps://link.springer.com/10.3103/S1063457617030042$$EHTML$$P50$$Gspringer$$H</linktohtml><link.rule.ids>314,780,784,27923,27924,41487,42556,51318</link.rule.ids></links><search><creatorcontrib>Beresnev, V. M.</creatorcontrib><creatorcontrib>Klimenko, S. A.</creatorcontrib><creatorcontrib>Sobol’, O. V.</creatorcontrib><creatorcontrib>Litovchenko, S. V.</creatorcontrib><creatorcontrib>Pogrebnjak, A. D.</creatorcontrib><creatorcontrib>Srebnyuk, P. A.</creatorcontrib><creatorcontrib>Kolesnikov, D. A.</creatorcontrib><creatorcontrib>Meilekhov, A. A.</creatorcontrib><creatorcontrib>Postel’nik, A. A.</creatorcontrib><creatorcontrib>Nemchenko, U. S.</creatorcontrib><title>Influence of the high-temperature annealing on the structure and mechanical properties of vacuum–arc coatings from Mo/(Ti + 6 wt % Si)N</title><title>Journal of superhard materials</title><addtitle>J. Superhard Mater</addtitle><description>Scanning electron microscopy with energy dispersive element microanalysis, X-ray structural analysis, and microindentation were used to study the effect of the deposition conditions in a reactive nitrogen atmosphere on the growth morphology, phase composition, structure, and microhardness of vacuum–arc multilayer coatings produced by the evaporation of cathodes from Mo and (Ti + 6 wt % Si) both after their deposition and after high-temperature annealing. It has been established that the use of the composite cathode of Ti and Si allows the formation of the structure state inclined to ordering to form a two-phase compound from TiN and Ti
5
Si
3
at high-temperature annealing. In this case the coating hardness increases to a value higher than 45 GPa.</description><subject>Annealing</subject><subject>Cathodes</subject><subject>Chemistry</subject><subject>Chemistry and Materials Science</subject><subject>Coatings</subject><subject>Deposition</subject><subject>Dispersion</subject><subject>Evaporation</subject><subject>Hardness</subject><subject>Mechanical properties</subject><subject>Microhardness</subject><subject>Nitrogen</subject><subject>Phase composition</subject><subject>Physical Chemistry</subject><subject>Production</subject><subject>Properties</subject><subject>Scanning electron microscopy</subject><subject>Structural analysis</subject><subject>Structure</subject><subject>Surface hardness</subject><subject>Titanium nitride</subject><issn>1063-4576</issn><issn>1934-9408</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2017</creationdate><recordtype>article</recordtype><recordid>eNp1kM1KxDAUhYsoOI4-gLuACIrUyU_bNEsZ_BkYdTHjuqRpMu3QJmOSKu7cuvYNfRIzziwEcXUvnO-cezlRdIzgJUGQjGYIZiRJaYYoJBAmeCcaIEaSmCUw3w17kOO1vh8dOLeEME0ZoYPoY6JV20stJDAK-FqCulnUsZfdSlrueysB11ryttELYPQP4bztxVaqQCdFzXUjeAtW1gSXb6Rbh71w0ffd1_sntwIIw32IcEBZ04F7MzqbN-ACZODVg1Mwa84fDqM9xVsnj7ZzGD3dXM_Hd_H08XYyvprGgqTMxxniuVIIsxSVtFIphDRnSBIuOS-rFGKMEx5QTHFe5mWpRFbRKi85K3OMKkaG0ckmN3z73Evni6XprQ4nC8QQzjKEGA0U2lDCGuesVMXKNh23bwWCxbrx4k_jwYM3HhdYvZD2V_K_pm9nf4OX</recordid><startdate>20170501</startdate><enddate>20170501</enddate><creator>Beresnev, V. M.</creator><creator>Klimenko, S. A.</creator><creator>Sobol’, O. V.</creator><creator>Litovchenko, S. V.</creator><creator>Pogrebnjak, A. D.</creator><creator>Srebnyuk, P. A.</creator><creator>Kolesnikov, D. A.</creator><creator>Meilekhov, A. A.</creator><creator>Postel’nik, A. A.</creator><creator>Nemchenko, U. S.</creator><general>Allerton Press</general><general>Springer Nature B.V</general><scope>AAYXX</scope><scope>CITATION</scope></search><sort><creationdate>20170501</creationdate><title>Influence of the high-temperature annealing on the structure and mechanical properties of vacuum–arc coatings from Mo/(Ti + 6 wt % Si)N</title><author>Beresnev, V. M. ; Klimenko, S. A. ; Sobol’, O. V. ; Litovchenko, S. V. ; Pogrebnjak, A. D. ; Srebnyuk, P. A. ; Kolesnikov, D. A. ; Meilekhov, A. A. ; Postel’nik, A. A. ; Nemchenko, U. S.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c359t-61a8ff12951b7df5007891e3aeaabd502224ac352728b8bbfc6d7d8ba9b821d93</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2017</creationdate><topic>Annealing</topic><topic>Cathodes</topic><topic>Chemistry</topic><topic>Chemistry and Materials Science</topic><topic>Coatings</topic><topic>Deposition</topic><topic>Dispersion</topic><topic>Evaporation</topic><topic>Hardness</topic><topic>Mechanical properties</topic><topic>Microhardness</topic><topic>Nitrogen</topic><topic>Phase composition</topic><topic>Physical Chemistry</topic><topic>Production</topic><topic>Properties</topic><topic>Scanning electron microscopy</topic><topic>Structural analysis</topic><topic>Structure</topic><topic>Surface hardness</topic><topic>Titanium nitride</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Beresnev, V. M.</creatorcontrib><creatorcontrib>Klimenko, S. A.</creatorcontrib><creatorcontrib>Sobol’, O. V.</creatorcontrib><creatorcontrib>Litovchenko, S. V.</creatorcontrib><creatorcontrib>Pogrebnjak, A. D.</creatorcontrib><creatorcontrib>Srebnyuk, P. A.</creatorcontrib><creatorcontrib>Kolesnikov, D. A.</creatorcontrib><creatorcontrib>Meilekhov, A. A.</creatorcontrib><creatorcontrib>Postel’nik, A. A.</creatorcontrib><creatorcontrib>Nemchenko, U. S.</creatorcontrib><collection>CrossRef</collection><jtitle>Journal of superhard materials</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Beresnev, V. M.</au><au>Klimenko, S. A.</au><au>Sobol’, O. V.</au><au>Litovchenko, S. V.</au><au>Pogrebnjak, A. D.</au><au>Srebnyuk, P. A.</au><au>Kolesnikov, D. A.</au><au>Meilekhov, A. A.</au><au>Postel’nik, A. A.</au><au>Nemchenko, U. S.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Influence of the high-temperature annealing on the structure and mechanical properties of vacuum–arc coatings from Mo/(Ti + 6 wt % Si)N</atitle><jtitle>Journal of superhard materials</jtitle><stitle>J. Superhard Mater</stitle><date>2017-05-01</date><risdate>2017</risdate><volume>39</volume><issue>3</issue><spage>172</spage><epage>177</epage><pages>172-177</pages><issn>1063-4576</issn><eissn>1934-9408</eissn><abstract>Scanning electron microscopy with energy dispersive element microanalysis, X-ray structural analysis, and microindentation were used to study the effect of the deposition conditions in a reactive nitrogen atmosphere on the growth morphology, phase composition, structure, and microhardness of vacuum–arc multilayer coatings produced by the evaporation of cathodes from Mo and (Ti + 6 wt % Si) both after their deposition and after high-temperature annealing. It has been established that the use of the composite cathode of Ti and Si allows the formation of the structure state inclined to ordering to form a two-phase compound from TiN and Ti
5
Si
3
at high-temperature annealing. In this case the coating hardness increases to a value higher than 45 GPa.</abstract><cop>New York</cop><pub>Allerton Press</pub><doi>10.3103/S1063457617030042</doi><tpages>6</tpages><oa>free_for_read</oa></addata></record> |
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| subjects | Annealing Cathodes Chemistry Chemistry and Materials Science Coatings Deposition Dispersion Evaporation Hardness Mechanical properties Microhardness Nitrogen Phase composition Physical Chemistry Production Properties Scanning electron microscopy Structural analysis Structure Surface hardness Titanium nitride |
| title | Influence of the high-temperature annealing on the structure and mechanical properties of vacuum–arc coatings from Mo/(Ti + 6 wt % Si)N |
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