Through-thickness texture gradient of tantalum sputtering target
For sputtering targets, through-thickness texture is critical for assuring reliable sputtering performance.In this paper, through-thickness texture gradient of a rolled and subsequently annealed tantalum sputtering target was investigated. The results show that by carefully controlling the rolling p...
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| Veröffentlicht in: | Rare metals 2017-06, Vol.36 (6), p.523-526 |
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| container_issue | 6 |
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| container_title | Rare metals |
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| creator | Deng, Chao Liu, Shi-Feng Hao, Xiao-Bo Ji, Jing-Li Liu, Qing Fan, Hai-Yang |
| description | For sputtering targets, through-thickness texture is critical for assuring reliable sputtering performance.In this paper, through-thickness texture gradient of a rolled and subsequently annealed tantalum sputtering target was investigated. The results show that by carefully controlling the rolling process, shear-related components at the surface of the rolled sample could be avoided. Both the rolled sample and the annealed target develop a through-thickness texture gradient with the formation of a stronger {1 1 1}fiber in the center layer compared with that in the surface layer. |
| doi_str_mv | 10.1007/s12598-014-0407-z |
| format | Article |
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The results show that by carefully controlling the rolling process, shear-related components at the surface of the rolled sample could be avoided. Both the rolled sample and the annealed target develop a through-thickness texture gradient with the formation of a stronger {1 1 1}fiber in the center layer compared with that in the surface layer.</description><identifier>ISSN: 1001-0521</identifier><identifier>EISSN: 1867-7185</identifier><identifier>DOI: 10.1007/s12598-014-0407-z</identifier><language>eng</language><publisher>Beijing: Nonferrous Metals Society of China</publisher><subject>Annealing ; Biomaterials ; Chemistry and Materials Science ; Energy ; Materials Engineering ; Materials Science ; Metallic Materials ; Nanoscale Science and Technology ; Physical Chemistry ; Shear ; Sputtering ; Surface layers ; Tantalum ; Texture ; 厚度 ; 梯度 ; 溅射靶材 ; 相关成分 ; 织构 ; 表面层 ; 轧制过程 ; 钽</subject><ispartof>Rare metals, 2017-06, Vol.36 (6), p.523-526</ispartof><rights>The Nonferrous Metals Society of China and Springer-Verlag Berlin Heidelberg 2014</rights><rights>Rare Metals is a copyright of Springer, 2017.</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c343t-9db8213a45d2b5f0a178e871a43c5ca7af34fca06b1267b86f0b325cc88d402f3</citedby><cites>FETCH-LOGICAL-c343t-9db8213a45d2b5f0a178e871a43c5ca7af34fca06b1267b86f0b325cc88d402f3</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Uhttp://image.cqvip.com/vip1000/qk/85314X/85314X.jpg</thumbnail><linktopdf>$$Uhttps://link.springer.com/content/pdf/10.1007/s12598-014-0407-z$$EPDF$$P50$$Gspringer$$H</linktopdf><linktohtml>$$Uhttps://link.springer.com/10.1007/s12598-014-0407-z$$EHTML$$P50$$Gspringer$$H</linktohtml><link.rule.ids>314,776,780,27901,27902,41464,42533,51294</link.rule.ids></links><search><creatorcontrib>Deng, Chao</creatorcontrib><creatorcontrib>Liu, Shi-Feng</creatorcontrib><creatorcontrib>Hao, Xiao-Bo</creatorcontrib><creatorcontrib>Ji, Jing-Li</creatorcontrib><creatorcontrib>Liu, Qing</creatorcontrib><creatorcontrib>Fan, Hai-Yang</creatorcontrib><title>Through-thickness texture gradient of tantalum sputtering target</title><title>Rare metals</title><addtitle>Rare Met</addtitle><addtitle>Rare Metals</addtitle><description>For sputtering targets, through-thickness texture is critical for assuring reliable sputtering performance.In this paper, through-thickness texture gradient of a rolled and subsequently annealed tantalum sputtering target was investigated. The results show that by carefully controlling the rolling process, shear-related components at the surface of the rolled sample could be avoided. Both the rolled sample and the annealed target develop a through-thickness texture gradient with the formation of a stronger {1 1 1}fiber in the center layer compared with that in the surface layer.</description><subject>Annealing</subject><subject>Biomaterials</subject><subject>Chemistry and Materials Science</subject><subject>Energy</subject><subject>Materials Engineering</subject><subject>Materials Science</subject><subject>Metallic Materials</subject><subject>Nanoscale Science and Technology</subject><subject>Physical Chemistry</subject><subject>Shear</subject><subject>Sputtering</subject><subject>Surface layers</subject><subject>Tantalum</subject><subject>Texture</subject><subject>厚度</subject><subject>梯度</subject><subject>溅射靶材</subject><subject>相关成分</subject><subject>织构</subject><subject>表面层</subject><subject>轧制过程</subject><subject>钽</subject><issn>1001-0521</issn><issn>1867-7185</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2017</creationdate><recordtype>article</recordtype><sourceid>BENPR</sourceid><recordid>eNp9kEtPwzAQhC0EEqXwA7hFcDasH7HdG6jiJVXiUs6W49hJSpu0tiNBfz2pUiFOnHa1mm9GOwhdE7gjAPI-EprPFAbCMXCQeH-CJkQJiSVR-emwAxAMOSXn6CLGFQDnQsAEPSzr0PVVjVPd2M_WxZgl95X64LIqmLJxbco6nyXTJrPuN1nc9im50LTVcAuVS5fozJt1dFfHOUUfz0_L-StevL-8zR8X2DLOEp6VhaKEGZ6XtMg9GCKVU5IYzmxujTSecW8NiIJQIQslPBSM5tYqVXKgnk3R7ei7Dd2udzHpVdeHdojUZAaC5WqQDSoyqmzoYgzO621oNiZ8awL6UJQei9JDUfpQlN4PDB2ZuD385cIf53-gm2NQ3bXVbuB-k4RklAqhCPsBtQR3jA</recordid><startdate>20170601</startdate><enddate>20170601</enddate><creator>Deng, Chao</creator><creator>Liu, Shi-Feng</creator><creator>Hao, Xiao-Bo</creator><creator>Ji, Jing-Li</creator><creator>Liu, Qing</creator><creator>Fan, Hai-Yang</creator><general>Nonferrous Metals Society of China</general><general>Springer Nature B.V</general><scope>2RA</scope><scope>92L</scope><scope>CQIGP</scope><scope>W92</scope><scope>~WA</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>8BQ</scope><scope>8FD</scope><scope>8FE</scope><scope>8FG</scope><scope>ABJCF</scope><scope>AFKRA</scope><scope>BENPR</scope><scope>BGLVJ</scope><scope>CCPQU</scope><scope>D1I</scope><scope>DWQXO</scope><scope>HCIFZ</scope><scope>JG9</scope><scope>KB.</scope><scope>PDBOC</scope><scope>PQEST</scope><scope>PQQKQ</scope><scope>PQUKI</scope><scope>PRINS</scope></search><sort><creationdate>20170601</creationdate><title>Through-thickness texture gradient of tantalum sputtering target</title><author>Deng, Chao ; 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The results show that by carefully controlling the rolling process, shear-related components at the surface of the rolled sample could be avoided. Both the rolled sample and the annealed target develop a through-thickness texture gradient with the formation of a stronger {1 1 1}fiber in the center layer compared with that in the surface layer.</abstract><cop>Beijing</cop><pub>Nonferrous Metals Society of China</pub><doi>10.1007/s12598-014-0407-z</doi><tpages>4</tpages></addata></record> |
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| source | Springer Nature - Complete Springer Journals; Alma/SFX Local Collection |
| subjects | Annealing Biomaterials Chemistry and Materials Science Energy Materials Engineering Materials Science Metallic Materials Nanoscale Science and Technology Physical Chemistry Shear Sputtering Surface layers Tantalum Texture 厚度 梯度 溅射靶材 相关成分 织构 表面层 轧制过程 钽 |
| title | Through-thickness texture gradient of tantalum sputtering target |
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