37‐2: Plane Source Evaporation Techniques for Super Ultra High Resolution Flexible AMOLED

The vacuum thermal evaporation (VTE) patterning technique using linear type evaporation sources has 3μm of minimum shadow distance so that the high resolution (577ppi, 2K QHD) AMOLED can be manufactured. However, there is a shadow limitation of the neighboring patterns overlapped when manufacturing...

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Veröffentlicht in:SID International Symposium Digest of technical papers 2017-05, Vol.48 (1), p.523-526
Hauptverfasser: Hwang, Changhun, Kim, Sung Su, Lee, Hagwon, Jo, Sung Min, Chin, Byung Doo, Kong, Do-Hoon, Ju, Sung Hoo
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container_title SID International Symposium Digest of technical papers
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creator Hwang, Changhun
Kim, Sung Su
Lee, Hagwon
Jo, Sung Min
Chin, Byung Doo
Kong, Do-Hoon
Ju, Sung Hoo
description The vacuum thermal evaporation (VTE) patterning technique using linear type evaporation sources has 3μm of minimum shadow distance so that the high resolution (577ppi, 2K QHD) AMOLED can be manufactured. However, there is a shadow limitation of the neighboring patterns overlapped when manufacturing the ultra‐high resolution (800ppi, 4K UHD) AMOLED. The plane source VTE shows recently of 1.1μm~1.3μm in shadow distance measurements and it verifies the possibility of manufacturing the ultra‐high resolution AMOLEDs with 1000~1500ppi. The shadow angle of 83° and shadow distance of 0.37μm have been predicted from the plane source AFM analysis and, therefore, it shows high possibility of manufacturing the super‐ultra‐high AMOLEDs with 3300ppi. The study of plane source evaporation and its evaporator need to be expanded for the AMOLED futures.
doi_str_mv 10.1002/sdtp.11690
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subjects Evaporation
High resolution
Manufacturing
Patterning
Plane source
PPI
Shadow distance
Vacuum thermal evaporation
VTE
title 37‐2: Plane Source Evaporation Techniques for Super Ultra High Resolution Flexible AMOLED
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