P‐79: Substrate Glass Evaluation for New PLAS TFT Technology

Generation 10 substrate glasses were evaluated to determine the performance impact on the newly developed partial laser annealed silicon (PLAS) TFT technology. We found that substrates with higher annealing point and Young's Modulus reduce total pitch (TP) and warp in this process and only slig...

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Veröffentlicht in:	SID International Symposium Digest of technical papers 2017-05, Vol.48 (1), p.1540-1542
Hauptverfasser:	Sisk, Stephanie, Bowden, Brad, Tashita, Hiroyuki, Kiczenski, TJ, Hoysan, Steve, Kato, Masahiro, Karatani, Kouichi, Nodera, Nobutake, Matsumoto, Takao, Kobayashi, Kazuki
Format:	Artikel
Sprache:	eng
Schlagworte:	a-Si Annealing Gen10 Glass Lasers LTPS Modulus of elasticity PLAS Silicon substrates substrate TFT Warp
Online-Zugang:	Volltext
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Beschreibung
Zusammenfassung:	Generation 10 substrate glasses were evaluated to determine the performance impact on the newly developed partial laser annealed silicon (PLAS) TFT technology. We found that substrates with higher annealing point and Young's Modulus reduce total pitch (TP) and warp in this process and only slightly reduce total pitch variation (TP).
ISSN:	0097-966X 2168-0159
DOI:	10.1002/sdtp.11943