Fabrication and Characterization of High-Sensitivity Underwater Acoustic Multimedia Communication Devices with Thick Composite PZT Films
This paper presents a high-sensitivity hydrophone fabricated with a Microelectromechanical Systems (MEMS) process using epitaxial thin films grown on silicon wafers. The evaluated resonant frequency was calculated through finite-element analysis (FEA). The hydrophone was designed, fabricated, and ch...
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| Veröffentlicht in: | Journal of sensors 2017-01, Vol.2017 (2017), p.1-7 |
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| container_issue | 2017 |
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| container_title | Journal of sensors |
| container_volume | 2017 |
| creator | Ahmad, Zubair Hung, Hsien-Seng Ho, Sheng-Yun Cheng, Yuang-Tung Liu, Jeng-Cheng Chang, Shun-Hsyung |
| description | This paper presents a high-sensitivity hydrophone fabricated with a Microelectromechanical Systems (MEMS) process using epitaxial thin films grown on silicon wafers. The evaluated resonant frequency was calculated through finite-element analysis (FEA). The hydrophone was designed, fabricated, and characterized by different measurements performed in a water tank, by using a pulsed sound technique with a sensitivity of −190 dB ± 2 dB for frequencies in the range 50–500 Hz. These results indicate the high-performance miniaturized acoustic devices, which can impact a variety of technological applications. |
| doi_str_mv | 10.1155/2017/7326919 |
| format | Article |
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The evaluated resonant frequency was calculated through finite-element analysis (FEA). The hydrophone was designed, fabricated, and characterized by different measurements performed in a water tank, by using a pulsed sound technique with a sensitivity of −190 dB ± 2 dB for frequencies in the range 50–500 Hz. These results indicate the high-performance miniaturized acoustic devices, which can impact a variety of technological applications.</description><identifier>ISSN: 1687-725X</identifier><identifier>EISSN: 1687-7268</identifier><identifier>DOI: 10.1155/2017/7326919</identifier><language>eng</language><publisher>Cairo, Egypt: Hindawi Publishing Corporation</publisher><subject>Acoustics ; Computer engineering ; Design ; Microelectromechanical systems ; Multimedia communications ; Residual stress ; Silicon wafers ; Sound ; Thin films</subject><ispartof>Journal of sensors, 2017-01, Vol.2017 (2017), p.1-7</ispartof><rights>Copyright © 2017 Jeng-Cheng Liu et al.</rights><rights>Copyright © 2017 Jeng-Cheng Liu et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.</rights><lds50>peer_reviewed</lds50><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c427t-c031b264e735d591cc0805159cf62a8737ed4de2a34967060d3e153e6ea466f93</citedby><cites>FETCH-LOGICAL-c427t-c031b264e735d591cc0805159cf62a8737ed4de2a34967060d3e153e6ea466f93</cites><orcidid>0000-0001-8079-3204</orcidid></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><link.rule.ids>314,776,780,27901,27902</link.rule.ids></links><search><contributor>Ahmad, Zubair</contributor><creatorcontrib>Ahmad, Zubair</creatorcontrib><creatorcontrib>Hung, Hsien-Seng</creatorcontrib><creatorcontrib>Ho, Sheng-Yun</creatorcontrib><creatorcontrib>Cheng, Yuang-Tung</creatorcontrib><creatorcontrib>Liu, Jeng-Cheng</creatorcontrib><creatorcontrib>Chang, Shun-Hsyung</creatorcontrib><title>Fabrication and Characterization of High-Sensitivity Underwater Acoustic Multimedia Communication Devices with Thick Composite PZT Films</title><title>Journal of sensors</title><description>This paper presents a high-sensitivity hydrophone fabricated with a Microelectromechanical Systems (MEMS) process using epitaxial thin films grown on silicon wafers. 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| source | Wiley Online Library Open Access; Elektronische Zeitschriftenbibliothek - Frei zugängliche E-Journals; Alma/SFX Local Collection |
| subjects | Acoustics Computer engineering Design Microelectromechanical systems Multimedia communications Residual stress Silicon wafers Sound Thin films |
| title | Fabrication and Characterization of High-Sensitivity Underwater Acoustic Multimedia Communication Devices with Thick Composite PZT Films |
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