Electrical and optical properties of lanthanum oxide-based films prepared by electron beam evaporation

Lanthanum oxide-based films were deposited on n-Si and quartz substrates using e-beam evaporation method. The XRD patterns demonstrated mixed structure consisting of La 2 O 3 and La(OH) 3 phases (referred as La 2 O 3 –OH). Optical and electrical properties of La 2 O 3 –OH films, as well as the effec...

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Veröffentlicht in:Applied physics. A, Materials science & processing Materials science & processing, 2017-06, Vol.123 (6), p.1-6, Article 448
Hauptverfasser: Igityan, Arsen, Aghamalyan, Natella, Petrosyan, Silva, Gambaryan, Irina, Badalyan, Georgi, Hovsepyan, Ruben, Kafadaryan, Yevgenia
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container_issue 6
container_start_page 1
container_title Applied physics. A, Materials science & processing
container_volume 123
creator Igityan, Arsen
Aghamalyan, Natella
Petrosyan, Silva
Gambaryan, Irina
Badalyan, Georgi
Hovsepyan, Ruben
Kafadaryan, Yevgenia
description Lanthanum oxide-based films were deposited on n-Si and quartz substrates using e-beam evaporation method. The XRD patterns demonstrated mixed structure consisting of La 2 O 3 and La(OH) 3 phases (referred as La 2 O 3 –OH). Optical and electrical properties of La 2 O 3 –OH films, as well as the effects of the annealing and storage conditions on these properties are described here. It is observed that conductance–voltage characteristics of Al/La 2 O 3 –OH/n-Si devices along with current rectification show negative differential conductance as a result of water molecule redox reaction on the film surface.
doi_str_mv 10.1007/s00339-017-1057-4
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subjects Aluminum
Annealing
Applied physics
Characterization and Evaluation of Materials
Condensed Matter Physics
Devices
Electric potential
Electrical properties
Electron beams
Lanthanum
Machines
Manufacturing
Materials science
Nanotechnology
Optical and Electronic Materials
Optical properties
Phases
Physics
Physics and Astronomy
Processes
Properties (attributes)
Quartz
Resistance
Silicon substrates
Surfaces and Interfaces
Thin Films
title Electrical and optical properties of lanthanum oxide-based films prepared by electron beam evaporation
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