Characterization of B-implanted 3C-SiC for intermediate band solar cells

Sublimation-grown 3C-SiC crystals were implanted with B ions at elevated temperature (400 °C) using multiple energies (100 to 575 keV) with a total dose of 1.3×10 17 atoms/cm 2 in order to form intermediate band (IB) in 3C-SiC. The samples were then annealed at 1400 oC for 60 min. An anomalous area...

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Veröffentlicht in:2016 European Conference on Silicon Carbide & Related Materials (ECSCRM) 2017-05, Vol.897, p.1-1
Hauptverfasser: Quanbao Ma, Carvalho, Patricia, Galeckas, Augustinas, Azarov, Alexander, Hovden, Sigurd, Thøgersen, Annett, Wright, Daniel N., Diplas, Spyros, Løvvik, Ole M., Jokubavicius, Valdas, Jianwu Sun, Syväjärvi, Mikael, Svensson, Bengt G.
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container_title 2016 European Conference on Silicon Carbide & Related Materials (ECSCRM)
container_volume 897
creator Quanbao Ma
Carvalho, Patricia
Galeckas, Augustinas
Azarov, Alexander
Hovden, Sigurd
Thøgersen, Annett
Wright, Daniel N.
Diplas, Spyros
Løvvik, Ole M.
Jokubavicius, Valdas
Jianwu Sun
Syväjärvi, Mikael
Svensson, Bengt G.
description Sublimation-grown 3C-SiC crystals were implanted with B ions at elevated temperature (400 °C) using multiple energies (100 to 575 keV) with a total dose of 1.3×10 17 atoms/cm 2 in order to form intermediate band (IB) in 3C-SiC. The samples were then annealed at 1400 oC for 60 min. An anomalous area in the center was observed in the PL emission pattern. The SIMS analysis indicated that the B concentration was the same both within and outside the anomalous area. The buried boron box-like concentration profile can reach ~3×10 21 cm -3 in the plateau region. In the anomalous area a broad emission band (possible IB) emerges at around ~1.7-1.8 eV, which may be associated with B-precipitates having a sufficiently high density.
doi_str_mv 10.4028/www.scientific.net/MSF.897.299
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ispartof 2016 European Conference on Silicon Carbide & Related Materials (ECSCRM), 2017-05, Vol.897, p.1-1
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subjects 3C-SiC
Boron
characterization
Crystal growth
cubic
Emission analysis
High temperature
implantation
intermediate band
Pattern analysis
Photonic band gap
Photovoltaic cells
Photovoltaic systems
photovoltaics
Physics
Precipitates
Silicon carbide
Solar cells
Sublimation
title Characterization of B-implanted 3C-SiC for intermediate band solar cells
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