Influence of Oxygen Partial Pressure on Opto-Electrical Properties, Crystallite Size and Dislocation Density of Sn Doped In_2O_3 Nanostructures

In this research, high-quality Sn doped indium oxide (ITO) thin films were grown on glass slide substrates using an electron beam evaporation method. Vacuum chamber partial pressure was changed and the electro-optical as well as the microstructure parameters were investigated. The microstructure of...

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Veröffentlicht in:Journal of electronic materials 2016-10, Vol.45 (10), p.5395
Hauptverfasser: Soleimanian, Vishtasb, Ghasemi Varnamkhasti, Mohsen
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Sprache:eng
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