Real-time stress detection of monocrystalline silicon by laser irradiation using Mach–Zehnder interferometry

The effect of changes in laser-induced stress upon irradiation of monocrystalline silicon was studied in detail using Mach–Zehnder interferometer, high speed camera and computer processing system, real-time detection of stress distribution and stress evolvement under different laser fluences and pul...

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Veröffentlicht in:	Pramāṇa 2016-12, Vol.87 (6), p.1-10, Article 98
Hauptverfasser:	GUO, MING, JIN, GUANGYONG, TAN, YONG, ZHANG, WEI, LI, MINGXIN, CAI, JIXING, MA, YAO
Format:	Artikel
Sprache:	eng
Schlagworte:	Astronomy Astrophysics and Astroparticles Cleavage Finite element method Fluence High speed cameras Interference fringes Irradiation Lasers Mach-Zehnder interferometers Observations and Techniques Physics Physics and Astronomy Real time Silicon Stress distribution
Online-Zugang:	Volltext
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