Design and fabrication of an surface acoustic wave resonator based on AlN/4H-SiC material for harsh environments

Surface acoustic wave （SAW） sensors and micro-electromechanical system （MEMS） technology provide a promising solution for measurement in harsh environments such as gas turbines. In this paper, a SAW resonator （size： 1107μm× 721 μm） based on the AlN/4H-SiC multilayer structure is designed and simulat...

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Veröffentlicht in:	Journal of Zhejiang University. A. Science 2017, Vol.18 (1), p.67-74
Hauptverfasser:	Wang, Wei-zhong, Liang, Ji, Ruan, Yong, Pang, Wei, You, Zheng
Format:	Artikel
Sprache:	eng
Schlagworte:	Civil Engineering Classical and Continuum Physics Engineering Fabrication Gas turbines High temperature Industrial Chemistry/Chemical Engineering Mechanical Engineering Silicon carbide Surface acoustic waves Surface waves Thin films
Online-Zugang:	Volltext
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