Chemical etching mechanism and properties of microstructures in sapphire modified by femtosecond laser

Sapphire, with extremely high hardness, high-temperature stability and wear resistance, often corroded in molten KOH at 300 °C after processing. The fabrication of microstructures on sapphire substrate performed by femtosecond laser irradiation combined with KOH solution chemical etching at room tem...

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Veröffentlicht in:	Applied physics. A, Materials science & processing Materials science & processing, 2017, Vol.123 (1), p.1-5, Article 99
Hauptverfasser:	Liu, Manyu, Hu, Youwang, Sun, Xiaoyan, Wang, Cong, Zhou, Jianying, Dong, Xinran, Yin, Kai, Chu, Dongkai, Duan, Ji’an
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied physics Characterization and Evaluation of Materials Condensed Matter Physics Machines Manufacturing Materials science Nanotechnology Optical and Electronic Materials Physics Physics and Astronomy Processes Surfaces and Interfaces Thin Films Wear resistance
Online-Zugang:	Volltext
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