The structural state of epitaxial GaP films of different polarities grown on misoriented Si(001) substrates

The structure of GaP films grown by molecular-beam epitaxy on vicinal Si(1113) substrates has been studied by X-ray diffraction. It is established that the crystalline lattice of a pseudomorphic film rotates about the axis toward increasing deviation from the singular orientation, while the subseque...

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Veröffentlicht in:Technical physics letters 2017-02, Vol.43 (2), p.213-215
Hauptverfasser: Loshkarev, I. D., Vasilenko, A. P., Trukhanov, E. M., Kolesnikov, A. V., Putyato, M. A., Esin, M. Yu, Petrushkov, M. O.
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container_title Technical physics letters
container_volume 43
creator Loshkarev, I. D.
Vasilenko, A. P.
Trukhanov, E. M.
Kolesnikov, A. V.
Putyato, M. A.
Esin, M. Yu
Petrushkov, M. O.
description The structure of GaP films grown by molecular-beam epitaxy on vicinal Si(1113) substrates has been studied by X-ray diffraction. It is established that the crystalline lattice of a pseudomorphic film rotates about the axis toward increasing deviation from the singular orientation, while the subsequent relaxation leads to rotation in the opposite direction. This is valid for the films of both (001) and (001̄) polarities. Differences between the surface morphologies of relaxed and pseudomorphic GaP films are revealed.
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subjects Classical and Continuum Physics
Epitaxial growth
Molecular beam epitaxy
Molecular structure
Physics
Physics and Astronomy
Silicon substrates
title The structural state of epitaxial GaP films of different polarities grown on misoriented Si(001) substrates
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