Parametric Resonance in Electrostatically Actuated Micromirrors
We consider an electrostatically actuated torsional micromirror, a key element of recent optical microdevices. The mechanical response is analyzed with specific emphasis on its nonlinear features. We show that the mirror motion is an example of parametric resonance, activated when the drive frequenc...
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| Veröffentlicht in: | IEEE transactions on industrial electronics (1982) 2017-02, Vol.64 (2), p.1544-1551 |
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| container_title | IEEE transactions on industrial electronics (1982) |
| container_volume | 64 |
| creator | Frangi, Attilio Guerrieri, Andrea Carminati, Roberto Mendicino, Gianluca |
| description | We consider an electrostatically actuated torsional micromirror, a key element of recent optical microdevices. The mechanical response is analyzed with specific emphasis on its nonlinear features. We show that the mirror motion is an example of parametric resonance, activated when the drive frequency is twice the natural frequency of the system. The numerical model, solved with a continuation approach, is validated with very good accuracy through an extensive experimental campaign. |
| doi_str_mv | 10.1109/TIE.2016.2615274 |
| format | Article |
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The mechanical response is analyzed with specific emphasis on its nonlinear features. We show that the mirror motion is an example of parametric resonance, activated when the drive frequency is twice the natural frequency of the system. The numerical model, solved with a continuation approach, is validated with very good accuracy through an extensive experimental campaign.</description><identifier>ISSN: 0278-0046</identifier><identifier>EISSN: 1557-9948</identifier><identifier>DOI: 10.1109/TIE.2016.2615274</identifier><identifier>CODEN: ITIED6</identifier><language>eng</language><publisher>New York: IEEE</publisher><subject>Continuation approaches ; Integrated optics ; Mathematical model ; Mathieu equation ; Mechanical analysis ; micromirrors ; microoptoelectromechanical systems (MOEMS) ; Mirrors ; Nonlinear optics ; Numerical models ; Optical bistability ; Optical imaging ; Optical sensors ; parametric resonance ; Resonance ; Resonant frequencies</subject><ispartof>IEEE transactions on industrial electronics (1982), 2017-02, Vol.64 (2), p.1544-1551</ispartof><rights>Copyright The Institute of Electrical and Electronics Engineers, Inc. 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The mechanical response is analyzed with specific emphasis on its nonlinear features. We show that the mirror motion is an example of parametric resonance, activated when the drive frequency is twice the natural frequency of the system. The numerical model, solved with a continuation approach, is validated with very good accuracy through an extensive experimental campaign.</description><subject>Continuation approaches</subject><subject>Integrated optics</subject><subject>Mathematical model</subject><subject>Mathieu equation</subject><subject>Mechanical analysis</subject><subject>micromirrors</subject><subject>microoptoelectromechanical systems (MOEMS)</subject><subject>Mirrors</subject><subject>Nonlinear optics</subject><subject>Numerical models</subject><subject>Optical bistability</subject><subject>Optical imaging</subject><subject>Optical sensors</subject><subject>parametric resonance</subject><subject>Resonance</subject><subject>Resonant frequencies</subject><issn>0278-0046</issn><issn>1557-9948</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2017</creationdate><recordtype>article</recordtype><sourceid>RIE</sourceid><recordid>eNo9kE1LAzEURYMoWKt7wc2A66l5k--VlFK1UFGkrkMm8wJTpjM1SRf-e6e0uLqbc9-7HELugc4AqHnarJazioKcVRJEpfgFmYAQqjSG60syoZXSJaVcXpOblLaUAhcgJuT500W3wxxbX3xhGnrXeyzavlh26HMcUna59a7rfou5zweXsSneWx-HXRvjENMtuQquS3h3zin5flluFm_l-uN1tZivS88py2WoTSO1YKxu6hpFcJwzdI00vkGtuGlqw5USDZdUhRAUCFN7LTwYIZEHzabk8XR3H4efA6Zst8Mh9uNLC1poZUBJGCl6osaBKUUMdh_bnYu_Fqg9arKjJnvUZM-axsrDqdIi4j-uhGYKJPsDbyhkCQ</recordid><startdate>20170201</startdate><enddate>20170201</enddate><creator>Frangi, Attilio</creator><creator>Guerrieri, Andrea</creator><creator>Carminati, Roberto</creator><creator>Mendicino, Gianluca</creator><general>IEEE</general><general>The Institute of Electrical and Electronics Engineers, Inc. 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| ispartof | IEEE transactions on industrial electronics (1982), 2017-02, Vol.64 (2), p.1544-1551 |
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| language | eng |
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| source | IEEE Electronic Library (IEL) |
| subjects | Continuation approaches Integrated optics Mathematical model Mathieu equation Mechanical analysis micromirrors microoptoelectromechanical systems (MOEMS) Mirrors Nonlinear optics Numerical models Optical bistability Optical imaging Optical sensors parametric resonance Resonance Resonant frequencies |
| title | Parametric Resonance in Electrostatically Actuated Micromirrors |
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