Fabrication and Numerical Characterization of Infrared Metamaterial Absorbers for Refractometric Biosensors

We report the successful fabrication of infrared plasmonic metamaterial absorbers by electron beam lithography and the lift-off technique. The absorber consists of periodic arrays of gold (Au) nanostructures deposited on a stack of thin silica spacer and gold film (acting as a mirror) on a silicon w...

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Veröffentlicht in:	Journal of electronic materials 2017, Vol.46 (1), p.668-676
Hauptverfasser:	Le, Khai Q., Bai, Jing, Ngo, Quang Minh, Chen, Pai-Yen
Format:	Artikel
Sprache:	eng
Schlagworte:	Biosensors Characterization and Evaluation of Materials Chemistry and Materials Science Electronics and Microelectronics Instrumentation Materials Science Optical and Electronic Materials Solid State Physics
Online-Zugang:	Volltext
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