Pure Nano-Rotation Scanner

We developed and tested a novel rotation scanner for nano resolution and accurate rotary motion about the rotation center. The scanner consists of circular hinges and leaf springs so that the parasitic error at the center of the scanner in the X and Y directions is minimized, and rotation performanc...

Ausführliche Beschreibung

Bibliographische Detailangaben

Veröffentlicht in:	Advances in Mechanical Engineering 2012, Vol.2012 (2012), p.1-11
Hauptverfasser:	Lee, Moo-Yeon, Park, Eun-Joo, Yeom, Jeong-Kuk, Hong, Dong-Pyo, Lee, Dong-Yeon
Format:	Artikel
Sprache:	eng
Schlagworte:	Fourier transforms Performance evaluation Scanners Sensors
Online-Zugang:	Volltext
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