Integrated Solenoid Inductor with [FeCoSiN/SiNx]18 Multilayer Magnetic Film for GHz Applications

In this work, we explored the solenoid inductor integrated [FeCoSiN/SiNx]18 multilayer magnetic film as magnetic core used in GHz range. The multilayer magnetic film was employed due to its high resistivity and excellent soft magnetic properties even in GHz range. It was found that this magnetic cor...

Ausführliche Beschreibung

Bibliographische Detailangaben

Veröffentlicht in:	Materials science forum 2015-11, Vol.833, p.85-89
Hauptverfasser:	Yuan, Bei Bei, Wang, Lai Sen, Liu, Xiao Long, Zou, C.Y., Luo, Qing, Zhang, Q.F., Peng, Dong Liang, Bai, Fei Ming, Wang, Yi Cheng, Xu, Lei
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!