Porous AlN with a Low Dielectric Constant Synthesized Based on the Physical Vapor Transport Principle

Porous AlN with low dielectric constant has been synthesized by the sacrificial template method based on the physical vapor transport principle. It is quite different from the traditional method that mixes the matrix with a pore-forming agent and utilizes liquid-phase sintering. The method consists...

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Veröffentlicht in:	Journal of electronic materials 2016-07, Vol.45 (7), p.3263-3267
Hauptverfasser:	Wang, Hua-Jie, Liu, Xue-Chao, Kong, Hai-Kuan, Xin, Jun, Gao, Pan, Shi, Er-Wei
Format:	Artikel
Sprache:	eng
Schlagworte:	Characterization and Evaluation of Materials Chemistry and Materials Science Dielectrics Electronics Electronics and Microelectronics Heat conductivity Instrumentation Materials Science Optical and Electronic Materials Solid State Physics
Online-Zugang:	Volltext
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