Waveguide-Based Technique for Wafer-Level Measurement of Phase and Group Effective Refractive Indices

A novel optical technique for multipoint on-wafer testing is reported. The technique exploits an integrated optical waveguide named point reflector optical waveguide (PROW) carrying multiple sensing probes based on lumped reflectors. PROW can be placed on the wafer along the desired paths, is compat...

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