Antenna-Coupled MOSFET Bolometers for Uncooled THz Sensing
In this paper, we present a comprehensive study on the operation of an antenna-coupled THz bolometer based on a micro-machined SOI-CMOS thermal sensor. The pixels are designed to operate at room temperature in vacuum. We focus on a new planar skirt antenna, which combines high sensitivity within a 0...
Gespeichert in:
| Veröffentlicht in: | IEEE transactions on terahertz science and technology 2015-11, Vol.5 (6), p.902-913 |
|---|---|
| Hauptverfasser: | , , , , , , , , , , , |
| Format: | Artikel |
| Sprache: | eng |
| Schlagworte: | |
| Online-Zugang: | Volltext bestellen |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
| container_end_page | 913 |
|---|---|
| container_issue | 6 |
| container_start_page | 902 |
| container_title | IEEE transactions on terahertz science and technology |
| container_volume | 5 |
| creator | Corcos, Dan Kaminski, Noam Shumaker, Evgeny Markish, Ofer Elad, Danny Morf, Thomas Drechsler, Ute Silatsa Saha, Winnie Tatiana Kull, Lukas Wood, Ken Pfeiffer, Ullrich R. Grzyb, Janusz |
| description | In this paper, we present a comprehensive study on the operation of an antenna-coupled THz bolometer based on a micro-machined SOI-CMOS thermal sensor. The pixels are designed to operate at room temperature in vacuum. We focus on a new planar skirt antenna, which combines high sensitivity within a 0.6-1.2 THz band and 30 ° HPBW. We present an overview of the design considerations, as well as the characterization results which were obtained with both broadband and CW THz sources. The NEP of the pixel is of the order of 25 pW/Hz 1/2 , with responsivity 100 mA/W at the optimal operating point. The peak responsivity to a broadband THz signal is 600 mA/W. The ease of integration with a read-out circuit and the low power dissipation make this type of pixel a good candidate for focal plane array architecture. |
| doi_str_mv | 10.1109/TTHZ.2015.2466470 |
| format | Article |
| fullrecord | <record><control><sourceid>proquest_RIE</sourceid><recordid>TN_cdi_proquest_journals_1759500088</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><ieee_id>7230309</ieee_id><sourcerecordid>3931983321</sourcerecordid><originalsourceid>FETCH-LOGICAL-c363t-ccf2546e49f441afcc47b8e59255818b449b47d9b65b0ec52ae03f0b747269973</originalsourceid><addsrcrecordid>eNo9kE9LAzEQxYMoWLQfQLwseN6aP5Nk460WtUKlh25BvITddCIt7aYm24N-endp6VxmYN6bx_wIuWN0xBg1j2U5_RpxyuSIg1Kg6QUZcCZVLgDU5Xnmn9dkmNKGdiWVKDQMyNO4abFpqnwSDvstrrKP-eL1pcyewzbssMWYMh9itmxcCP26nP5lC2zSuvm-JVe-2iYcnvoNWXbOyTSfzd_eJ-NZ7oQSbe6c5xIUgvEArPLOga4LlIZLWbCiBjA16JWplawpOskrpMLTWoPmyhgtbsjD8e4-hp8DptZuwiE2XaRlWhrZfVMUnYodVS6GlCJ6u4_rXRV_LaO2p2R7SranZE-UOs_90bNGxLNec0EFNeIfxiVg8A</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype><pqid>1759500088</pqid></control><display><type>article</type><title>Antenna-Coupled MOSFET Bolometers for Uncooled THz Sensing</title><source>IEEE Electronic Library (IEL)</source><creator>Corcos, Dan ; Kaminski, Noam ; Shumaker, Evgeny ; Markish, Ofer ; Elad, Danny ; Morf, Thomas ; Drechsler, Ute ; Silatsa Saha, Winnie Tatiana ; Kull, Lukas ; Wood, Ken ; Pfeiffer, Ullrich R. ; Grzyb, Janusz</creator><creatorcontrib>Corcos, Dan ; Kaminski, Noam ; Shumaker, Evgeny ; Markish, Ofer ; Elad, Danny ; Morf, Thomas ; Drechsler, Ute ; Silatsa Saha, Winnie Tatiana ; Kull, Lukas ; Wood, Ken ; Pfeiffer, Ullrich R. ; Grzyb, Janusz</creatorcontrib><description>In this paper, we present a comprehensive study on the operation of an antenna-coupled THz bolometer based on a micro-machined SOI-CMOS thermal sensor. The pixels are designed to operate at room temperature in vacuum. We focus on a new planar skirt antenna, which combines high sensitivity within a 0.6-1.2 THz band and 30 ° HPBW. We present an overview of the design considerations, as well as the characterization results which were obtained with both broadband and CW THz sources. The NEP of the pixel is of the order of 25 pW/Hz 1/2 , with responsivity 100 mA/W at the optimal operating point. The peak responsivity to a broadband THz signal is 600 mA/W. The ease of integration with a read-out circuit and the low power dissipation make this type of pixel a good candidate for focal plane array architecture.</description><identifier>ISSN: 2156-342X</identifier><identifier>EISSN: 2156-3446</identifier><identifier>DOI: 10.1109/TTHZ.2015.2466470</identifier><identifier>CODEN: ITTSBX</identifier><language>eng</language><publisher>Piscataway: IEEE</publisher><subject>Antenna-coupled bolometers ; Antennas ; Bandwidth ; Bolometers ; Couplings ; Lenses ; micromachined sensors ; Noise ; silicon-on-insulator ; Temperature sensors ; terahertz (THz) imaging ; uncooled sensors</subject><ispartof>IEEE transactions on terahertz science and technology, 2015-11, Vol.5 (6), p.902-913</ispartof><rights>Copyright The Institute of Electrical and Electronics Engineers, Inc. (IEEE) 2015</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c363t-ccf2546e49f441afcc47b8e59255818b449b47d9b65b0ec52ae03f0b747269973</citedby><cites>FETCH-LOGICAL-c363t-ccf2546e49f441afcc47b8e59255818b449b47d9b65b0ec52ae03f0b747269973</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/7230309$$EHTML$$P50$$Gieee$$H</linktohtml><link.rule.ids>314,776,780,792,27901,27902,54733</link.rule.ids><linktorsrc>$$Uhttps://ieeexplore.ieee.org/document/7230309$$EView_record_in_IEEE$$FView_record_in_$$GIEEE</linktorsrc></links><search><creatorcontrib>Corcos, Dan</creatorcontrib><creatorcontrib>Kaminski, Noam</creatorcontrib><creatorcontrib>Shumaker, Evgeny</creatorcontrib><creatorcontrib>Markish, Ofer</creatorcontrib><creatorcontrib>Elad, Danny</creatorcontrib><creatorcontrib>Morf, Thomas</creatorcontrib><creatorcontrib>Drechsler, Ute</creatorcontrib><creatorcontrib>Silatsa Saha, Winnie Tatiana</creatorcontrib><creatorcontrib>Kull, Lukas</creatorcontrib><creatorcontrib>Wood, Ken</creatorcontrib><creatorcontrib>Pfeiffer, Ullrich R.</creatorcontrib><creatorcontrib>Grzyb, Janusz</creatorcontrib><title>Antenna-Coupled MOSFET Bolometers for Uncooled THz Sensing</title><title>IEEE transactions on terahertz science and technology</title><addtitle>TTHZ</addtitle><description>In this paper, we present a comprehensive study on the operation of an antenna-coupled THz bolometer based on a micro-machined SOI-CMOS thermal sensor. The pixels are designed to operate at room temperature in vacuum. We focus on a new planar skirt antenna, which combines high sensitivity within a 0.6-1.2 THz band and 30 ° HPBW. We present an overview of the design considerations, as well as the characterization results which were obtained with both broadband and CW THz sources. The NEP of the pixel is of the order of 25 pW/Hz 1/2 , with responsivity 100 mA/W at the optimal operating point. The peak responsivity to a broadband THz signal is 600 mA/W. The ease of integration with a read-out circuit and the low power dissipation make this type of pixel a good candidate for focal plane array architecture.</description><subject>Antenna-coupled bolometers</subject><subject>Antennas</subject><subject>Bandwidth</subject><subject>Bolometers</subject><subject>Couplings</subject><subject>Lenses</subject><subject>micromachined sensors</subject><subject>Noise</subject><subject>silicon-on-insulator</subject><subject>Temperature sensors</subject><subject>terahertz (THz) imaging</subject><subject>uncooled sensors</subject><issn>2156-342X</issn><issn>2156-3446</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2015</creationdate><recordtype>article</recordtype><sourceid>RIE</sourceid><recordid>eNo9kE9LAzEQxYMoWLQfQLwseN6aP5Nk460WtUKlh25BvITddCIt7aYm24N-endp6VxmYN6bx_wIuWN0xBg1j2U5_RpxyuSIg1Kg6QUZcCZVLgDU5Xnmn9dkmNKGdiWVKDQMyNO4abFpqnwSDvstrrKP-eL1pcyewzbssMWYMh9itmxcCP26nP5lC2zSuvm-JVe-2iYcnvoNWXbOyTSfzd_eJ-NZ7oQSbe6c5xIUgvEArPLOga4LlIZLWbCiBjA16JWplawpOskrpMLTWoPmyhgtbsjD8e4-hp8DptZuwiE2XaRlWhrZfVMUnYodVS6GlCJ6u4_rXRV_LaO2p2R7SranZE-UOs_90bNGxLNec0EFNeIfxiVg8A</recordid><startdate>20151101</startdate><enddate>20151101</enddate><creator>Corcos, Dan</creator><creator>Kaminski, Noam</creator><creator>Shumaker, Evgeny</creator><creator>Markish, Ofer</creator><creator>Elad, Danny</creator><creator>Morf, Thomas</creator><creator>Drechsler, Ute</creator><creator>Silatsa Saha, Winnie Tatiana</creator><creator>Kull, Lukas</creator><creator>Wood, Ken</creator><creator>Pfeiffer, Ullrich R.</creator><creator>Grzyb, Janusz</creator><general>IEEE</general><general>The Institute of Electrical and Electronics Engineers, Inc. (IEEE)</general><scope>97E</scope><scope>RIA</scope><scope>RIE</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>7SP</scope><scope>8FD</scope><scope>L7M</scope></search><sort><creationdate>20151101</creationdate><title>Antenna-Coupled MOSFET Bolometers for Uncooled THz Sensing</title><author>Corcos, Dan ; Kaminski, Noam ; Shumaker, Evgeny ; Markish, Ofer ; Elad, Danny ; Morf, Thomas ; Drechsler, Ute ; Silatsa Saha, Winnie Tatiana ; Kull, Lukas ; Wood, Ken ; Pfeiffer, Ullrich R. ; Grzyb, Janusz</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c363t-ccf2546e49f441afcc47b8e59255818b449b47d9b65b0ec52ae03f0b747269973</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2015</creationdate><topic>Antenna-coupled bolometers</topic><topic>Antennas</topic><topic>Bandwidth</topic><topic>Bolometers</topic><topic>Couplings</topic><topic>Lenses</topic><topic>micromachined sensors</topic><topic>Noise</topic><topic>silicon-on-insulator</topic><topic>Temperature sensors</topic><topic>terahertz (THz) imaging</topic><topic>uncooled sensors</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Corcos, Dan</creatorcontrib><creatorcontrib>Kaminski, Noam</creatorcontrib><creatorcontrib>Shumaker, Evgeny</creatorcontrib><creatorcontrib>Markish, Ofer</creatorcontrib><creatorcontrib>Elad, Danny</creatorcontrib><creatorcontrib>Morf, Thomas</creatorcontrib><creatorcontrib>Drechsler, Ute</creatorcontrib><creatorcontrib>Silatsa Saha, Winnie Tatiana</creatorcontrib><creatorcontrib>Kull, Lukas</creatorcontrib><creatorcontrib>Wood, Ken</creatorcontrib><creatorcontrib>Pfeiffer, Ullrich R.</creatorcontrib><creatorcontrib>Grzyb, Janusz</creatorcontrib><collection>IEEE All-Society Periodicals Package (ASPP) 2005-present</collection><collection>IEEE All-Society Periodicals Package (ASPP) 1998-Present</collection><collection>IEEE Electronic Library (IEL)</collection><collection>CrossRef</collection><collection>Electronics & Communications Abstracts</collection><collection>Technology Research Database</collection><collection>Advanced Technologies Database with Aerospace</collection><jtitle>IEEE transactions on terahertz science and technology</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Corcos, Dan</au><au>Kaminski, Noam</au><au>Shumaker, Evgeny</au><au>Markish, Ofer</au><au>Elad, Danny</au><au>Morf, Thomas</au><au>Drechsler, Ute</au><au>Silatsa Saha, Winnie Tatiana</au><au>Kull, Lukas</au><au>Wood, Ken</au><au>Pfeiffer, Ullrich R.</au><au>Grzyb, Janusz</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Antenna-Coupled MOSFET Bolometers for Uncooled THz Sensing</atitle><jtitle>IEEE transactions on terahertz science and technology</jtitle><stitle>TTHZ</stitle><date>2015-11-01</date><risdate>2015</risdate><volume>5</volume><issue>6</issue><spage>902</spage><epage>913</epage><pages>902-913</pages><issn>2156-342X</issn><eissn>2156-3446</eissn><coden>ITTSBX</coden><abstract>In this paper, we present a comprehensive study on the operation of an antenna-coupled THz bolometer based on a micro-machined SOI-CMOS thermal sensor. The pixels are designed to operate at room temperature in vacuum. We focus on a new planar skirt antenna, which combines high sensitivity within a 0.6-1.2 THz band and 30 ° HPBW. We present an overview of the design considerations, as well as the characterization results which were obtained with both broadband and CW THz sources. The NEP of the pixel is of the order of 25 pW/Hz 1/2 , with responsivity 100 mA/W at the optimal operating point. The peak responsivity to a broadband THz signal is 600 mA/W. The ease of integration with a read-out circuit and the low power dissipation make this type of pixel a good candidate for focal plane array architecture.</abstract><cop>Piscataway</cop><pub>IEEE</pub><doi>10.1109/TTHZ.2015.2466470</doi><tpages>12</tpages></addata></record> |
| fulltext | fulltext_linktorsrc |
| identifier | ISSN: 2156-342X |
| ispartof | IEEE transactions on terahertz science and technology, 2015-11, Vol.5 (6), p.902-913 |
| issn | 2156-342X 2156-3446 |
| language | eng |
| recordid | cdi_proquest_journals_1759500088 |
| source | IEEE Electronic Library (IEL) |
| subjects | Antenna-coupled bolometers Antennas Bandwidth Bolometers Couplings Lenses micromachined sensors Noise silicon-on-insulator Temperature sensors terahertz (THz) imaging uncooled sensors |
| title | Antenna-Coupled MOSFET Bolometers for Uncooled THz Sensing |
| url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-02-08T05%3A42%3A32IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-proquest_RIE&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=Antenna-Coupled%20MOSFET%20Bolometers%20for%20Uncooled%20THz%20Sensing&rft.jtitle=IEEE%20transactions%20on%20terahertz%20science%20and%20technology&rft.au=Corcos,%20Dan&rft.date=2015-11-01&rft.volume=5&rft.issue=6&rft.spage=902&rft.epage=913&rft.pages=902-913&rft.issn=2156-342X&rft.eissn=2156-3446&rft.coden=ITTSBX&rft_id=info:doi/10.1109/TTHZ.2015.2466470&rft_dat=%3Cproquest_RIE%3E3931983321%3C/proquest_RIE%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_pqid=1759500088&rft_id=info:pmid/&rft_ieee_id=7230309&rfr_iscdi=true |