Development of a monochromator for aberration-corrected scanning transmission electron microscopy
In this article, we report the development of a new 200-kV analytical electron microscope equipped with a monochromator with an integrated double Wien-filter system. It enables us to study the electronic structures of materials in detail using electron energy-loss spectroscopy (EELS) analysis at an...
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| Veröffentlicht in: | Journal of electron microscopy 2015-06, Vol.64 (3), p.151 |
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| container_title | Journal of electron microscopy |
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| creator | Mukai, Masaki Okunishi, Eiji Ashino, Masanori Omoto, Kazuya Fukuda, Tomohisa Ikeda, Akihiro Somehara, Kazunori Kaneyama, Toshikatsu Saitoh, Tomohiro Hirayama, Tsukasa Ikuhara, Yuichi |
| description | In this article, we report the development of a new 200-kV analytical electron microscope equipped with a monochromator with an integrated double Wien-filter system. It enables us to study the electronic structures of materials in detail using electron energy-loss spectroscopy (EELS) analysis at an atomic scale. A highly monochromated and isotropically round electron probe is produced on the specimen plane. The ultimate energy resolutions with 0.1-s acquisition times are measured to be 36 meV at 200 kV and 30 meV at 60 kV. In an EELS mapping experiment performed on SrTiO... with a monochromated electron probe whose energy resolution is 146 meV, an elemental map exhibits atomic resolution. (ProQuest: ... denotes formulae/symbols omitted.) |
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| ispartof | Journal of electron microscopy, 2015-06, Vol.64 (3), p.151 |
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| language | eng |
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| source | Alma/SFX Local Collection |
| subjects | Electrons Molecular structure Optics Scanning electron microscopy Spectrum analysis Transmission electron microscopy |
| title | Development of a monochromator for aberration-corrected scanning transmission electron microscopy |
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