TC-LIGBTs on the Thin SoI Layer for the High Voltage Monolithic ICs With High Current Density and Latch-Up Immunity

A new 700 V tridimensional channel-lateral insulated-gate bipolar transistor (TC-LIGBT) structure on 1.5-μm-thin silicon on insulator (SoI) layer is presented in detail in this paper. There are numerous separated p-body cells located in the emitter region of the investigated TC-LIGBT, which can incr...

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Veröffentlicht in:IEEE transactions on electron devices 2014-11, Vol.61 (11), p.3814-3820
Hauptverfasser: Zhu, Jing, Sun, Weifeng, Dai, Weinan, Zhang, Long, Lu, Shenli, Shi, Longxi, Yi, Yangbo, Zhang, Sen, Su, Wei
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Sprache:eng
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