Design and Control of Phase-Detection Mode Atomic Force Microscopy for Reconstruction of Cell Contours in Three Dimensions

Atomic force microscopy (AFM) is capable of producing accurate 3-D images at nanometer resolution. As a result, AFM is widely used in applications related to cell biology, such as the diagnosis and observation of tumor cells. This paper proposes phase-detection mode atomic force microscopy (PM-AFM)...

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Veröffentlicht in:	IEEE transactions on nanotechnology 2014-07, Vol.13 (4), p.639-649
Hauptverfasser:	Wu, Jim-Wei, Chen, Jyun-Jhih, Chiang, Ming-Li, Yu, Jen-te, Fu, Li-Chen
Format:	Artikel
Sprache:	eng
Schlagworte:	Atomic force microscopy Contours Controllers Cross coupling Force Hysteresis Microscopes Microscopy Nanostructure Nanotechnology Reconstruction Scanning Sliding mode control Surface topography Three dimensional Uncertainty
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