A negative-capacitance equivalent circuit model for parallel-plate capacitive-gap-transduced micromechanical resonators

A small-signal equivalent circuit for parallelplate capacitive-gap-transduced micromechanical resonators is introduced that employs negative capacitance to model the dependence of resonance frequency on electrical stiffness in a way that facilitates circuit analysis, that better elucidates the mecha...

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Veröffentlicht in:	IEEE transactions on ultrasonics, ferroelectrics, and frequency control ferroelectrics, and frequency control, 2014-05, Vol.61 (5), p.849
Hauptverfasser:	Akgul, Mehmet, Wu, Lingqi, Ren, Zeying, Nguyen, Clark
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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