Visual Servo Feedback Control of a Novel Large Working Range Micro Manipulation System for Microassembly

This paper presents a novel micro manipulation system based on visual servo feedback control, which is composed of a micro/nano positioning stage with large workspace, a micro gripper, and a microscope-based visual servo system. The positioning stage is featured with compliant flexure-based totally...

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Veröffentlicht in:	Journal of microelectromechanical systems 2014-02, Vol.23 (1), p.181-190
Hauptverfasser:	Xiao, Shunli, Li, Yangmin
Format:	Artikel
Sprache:	eng
Schlagworte:	Actuators Applied sciences Control theory Drives electromagnetic actuator Electromagnetics Exact sciences and technology Feedback control Fingers flexure hinges Force Grippers Instruments, apparatus, components and techniques common to several branches of physics and astronomy Linkage mechanisms, cams Mechanical engineering. Machine design Mechanical instruments, equipment and techniques micro manipulation micro-assembly Micromechanical devices and systems Microscopy Physics Precision engineering, watch making Prototypes Servocontrol Servomechanisms Silver Software Visual Visual servo feedback control Visualization
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