Fused-Silica Micro Birdbath Resonator Gyroscope ( \mu-BRG)

We present a 3-D fused-silica micro-scale shell gyroscope, called the birdbath resonator gyroscope (BRG). The BRGs axisymmetric geometry leads to a good frequency and Q symmetry. The birdbath resonator can be fabricated with a good structural symmetry because its anchor is self-aligned to the rest o...

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