High Intensity Excimer UV Irradiation Unit
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Veröffentlicht in: | Hyōmen gijutsu 2002/08/01, Vol.53(8), pp.511-514 |
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container_title | Hyōmen gijutsu |
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creator | YOSHIKAWA, Kazuhiko TAUCHI, Akihiko |
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doi_str_mv | 10.4139/sfj.53.511 |
format | Article |
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identifier | ISSN: 0915-1869 |
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issn | 0915-1869 1884-3409 |
language | eng |
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source | EZB-FREE-00999 freely available EZB journals |
subjects | Contact Angle Excimer Lamp Large Sabstrate UV Irradiation Unit |
title | High Intensity Excimer UV Irradiation Unit |
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