Depth Profiles of Na Implanted in Glass-Like Carbon and the Change in Atomic Density for Implanted Layers

Depth profiles of Na-atoms implanted in glass-like carbon (GLC, 1.5g/cm3) were measured using of SIMS and RBS, and the atomic density of the implanted layers was determined by comparing SIMS and RBS results. Na-ion implantation was carried out with doses ranging from 1×1015 to 1×1017ions/cm2 at an e...

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Veröffentlicht in:	Hyōmen gijutsu 2000/01/01, Vol.51(1), pp.94-98
Hauptverfasser:	IWAKI, Masaya, TERASHIMA, Kei-ichi
Format:	Artikel
Sprache:	eng ; jpn
Schlagworte:	Atomic Density Carbon Na Implantation RBS SIMS
Online-Zugang:	Volltext
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